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Evaluation of the mechanical properties of germanium-on-insulator (GeOI) films by Raman spectroscopy and nanoindentation
Authors
H. Baumgart
A. A. Elmustafa
+3 more
S. Heissler
Y. S. Mohammed
K. Zhang
Publication date
1 October 2020
Publisher
American Institute of Physics
Doi
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oai:EVASTAR-Karlsruhe.de:10001...
Last time updated on 29/06/2022
