Borens, S.

Guttmann, M.

Hanemann, T.

Heneka, J.

Plewa, K.

English

KITopen

Tool ConceptThe tool concept for the microsystem 50 injection moldingmachine is based on a pulling step.Figure 3 shows the following main steps of the tool concept:1. Complete filling of the cavities with closed mold2. Opening movement of the ejector side (200 µm)3. Separation of the parts with a pulling step4. Ejection of the gate systemHandlingThe existing handling modulof the microsystem 50 machineis supplemented with anunderpressure modul. This model cancollect parts in the µm range. ConclusionsA complete LIGA process sequence can be shown with a newmold insert design, mold concept and handling system.AcknowledgementsWe gratefully acknowledge the participating companiesArburg GmbH+Co KG, Otto Männer GmbH and RKT Rodinger Kunstoff-Technik GmbH. This work was carried out with the support of the Karlsruhe Nano Micro Facility (KNMF, www.kit.edu/knmf), a Helmholtz Research Infrastructure at Karlsruhe Institute of Technology (KIT, www.kit.edu).Development of a tool concept for the injection moldingof LIGA mold insertsMotivationIn the micro replication like micro injection molding LIGA  mold inserts are used.  LIGA parts have several applicationsin different fields of industry like micro mechanics, microfluidics, medicine and biotechnology. For a reliable andcost efficient manufacturing of LIGA mold inserts new moldconcepts for injection molding need to be developed. Aspectscovered including mold insert fabrication, tool concept andhandling system for micro injection molding. The LIGA ProcessThe LIGA process (Lithographie, Galvanoformung, Abformung)  invented in the 1980‘s has developed to a keyproduction technology in the microsystem technology. Figure 1 shows the following main steps of the LIGA process:  1. Preparing the substrate and resist2. X-ray lithography3. Development4. Electrodepositon5. Mechanical postprocessing6. Installing the mold inserts in a holder plateMold insertsThe mechanical post-processing of the LIGA moldInserts is shown in Figure 2. Figure 1: The LIGA process chain *Institute for Applied Materials – Material Process Technology (IAM-WPT) - KIT, Karlsruhe Institute of Technology, Germany**Institute of Microstructure Technology (IMT) - KIT, Karlsruhe Institute of Technology, Germany***Department of Microsystems Engineering - IMTEK, University of Freiburg, GermanyJ. Heneka*, S. Borens*, M.Guttmann **, T. Hanemann*, ***, K. Plewa *Figure 5: 1) microsystem 50, 2) handling systemFigure 4: 1) mold for the microsystem 50 injection molding machine 2) mold insert holder plate Figure 2: 1) structured nickel, 2) dimensions of the mold inserts, 3) LIGA mold inserts,  4) SEM figure of a LIGA cavityFigure 3: Process sequence of the mold conceptmicro partopening for theunderpressure5165432123 41 4321 212

Development of a tool concept for the injection molding of LIGA mold inserts

https://publikationen.bibliothek.kit.edu/220088648/3816175

Development of a tool concept for the injection molding of LIGA mold inserts

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