Vysoké učení technické v Brně, Fakulta elektrotechniky a komunikačních technologií
Abstract
This article deals with a setup for automated cold cathode etching, its difficulties and benefits. As the method is well know there are no articles which describes this procedure in detail at least for tungsten wires from which cathodes are made. To provide stable and repeatable process of cathodes manufacturing, the experimental setup was proposed with full hardware control with aim to assure etching circuit disconnection in order of hundreds of nanoseconds