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Ein mikromechanischer Vakuumsensor nach dem Reibungsprinzip
Authors
Wolfram Dötzel
Thomas Geßner
Steffen Kurth
Dirk Tenholte
Publication date
20 December 2010
Publisher
Abstract
Abstract is not available.
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Digitale Bibliothek Thüringen
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Last time updated on 14/08/2019
