sj-docx-1-pie-10.1177_09544089221124226 - Supplemental material for Synthesis of Al₂O₃/SiO₂ core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers

Abstract

Supplemental material, sj-docx-1-pie-10.1177_09544089221124226 for Synthesis of Al2O3/SiO2 core–shell composite abrasives toward ultrasmooth and high-efficiency polishing for sapphire wafers by Yongchao Xu, Guangen Zhao, Qianting Wang and Youji Zhan, Bingsan Chen in Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering</p