Planar micromachined glass cantilevers utilising integrated Bragg Fabry-Perot cavities

Abstract

Here we demonstrate a glass cantilever based on a unique micromachining and etching approach, combined with UV written Bragg gratings. We shall also discuss the increase in sensitivity by using two Bragg gratings to form Fabry-Pérot cavity. Cantilevers are in ultra sensitive force sensors used in applications such as Atomic Force Microscopy, mass sensing and acoustic transducers