Thermoelectric technology can be used to generate a small amount of electrical power, typically in the µW or mW range, if a temperature difference is maintained between two terminals of a thermoelectric module. Alternatively, a thermoelectric module can operate as a heat pump, providing heating or cooling of an object connected to one side of a thermoelectric module if a DC current is applied to the module’s input terminals. This chapter reviews the development of microelectromechanical systems (MEMS) based thermoelectric devices suitable for micro-power generation, heating and cooling applications. The chapter begins with a brief overview of thermoelectric technology, macro-thermoelectric module construction and operation. Micro-thermoelectric modules are introduced, and a review of recent developments in research, commercial development, and typical application of MEMS based micro-thermoelectric devices is made. The chapter draws conclusions on the development and potential application of MEMS based thermoelectric devices suitable for thermoelectric cooling, heating and micro-power generation
