Ultrasonic cavitation assisted micro-electrical discharge
machining was used to fabricate microstructures
on reaction-bonded silicon carbide. To aid the
removal of debris from the machining gap and to obtain
a good surface finish, carbon nanofibers were
added into the dielectric fluid. The suspension of carbon
nanofibers in the dielectric fluid and the cavitation
bubble effect induced by the vibration of the dielectric
fluid proved to be effective in reducing the deposition
of tool material on the workpiece surface. The tool material
deposition rate was found to be significantly affected
by the vibration amplitude and the distance between
the oscillator and the workpiece. With a hemispherical
electrode and inclined workpiece, high accuracy
micro-dimples could be obtained within a short
time. A nanometer-level surface finish was successfully
obtained on a hard-brittle RB-SiCmoldmaterial
