Manufacturing-induced defects have drawn more and more attentions to improve the laser damage resistance performance of KDP crystal applied in high-power laser systems. Here, the morphology of surface scratches on diamond fly-cut KDP crystal is characterized and their effect on the laser damage resistance is theoretically and experimentally investigated. The results indicate that surface scratches could lower laser-induced damage threshold (LIDT) by modulating incident lasers and producing resultant local light intensifications. The induced maximum light intensity enhancement factors (LIEFs) are dependent on scratch shapes and dimensions. The diffraction effects originating from scratch edges are responsible for the strongest light intensification. Even for ultra-precision finished KDP surface with scratches that well satisfy the currently applied scratch/dig specification, the induced LIEFs are quite high, indicating that the actual defect dimension allowance should be amended and specified according to the defect-induced LIEFs. The effect of scratches on laser damage resistance is experimentally verified by the tested LIDT, which is approximately consistent with the simulation one. The morphologies of laser damage sites further confirm the role of scratches in lowering LIDT. This work could offer new perspective and guidance for fully evaluating the performance of ultra-precision manufactured optical materials applied in high-power laser facilities
