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Some Considerations of the Kinetics and Thermodynamics of CVD Processes
Authors
BS Meyerson
BS Meyerson
+11Â more
CG Newman
G Inoue
JH Purnell
ML Hitchman
ML Hitchman
ML Hitchman
ML Hitchman
P John
RFC Farrow
S Nakayama
SM Gates
Publication date
1 January 1989
Publisher
'Springer Science and Business Media LLC'
Doi
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info:doi/10.1007%2F978-1-4899-...
Last time updated on 22/07/2021