Area Selective Deposition of Metals from the Electrical Resistivity of the Substrate

Abstract

Area selective deposition (ASD) of films only on desired areas of the substrate opens for less complex fabrication of nanoscaled electronics. We show that a newly developed CVD method, where plasma electrons are used as the reducing agent in deposition of metallic thin films, is inherently area selective from the electrical resistivity of the substrate surface. When depositing iron with the new CVD method, no film is deposited on high-resistivity SiO2 surfaces whereas several hundred nanometers thick iron films are deposited on areas with low resistivity, obtained by adding a thin layer of silver on the SiO2 surface. On the basis of such a scheme, we show how to use the electric resistivity of the substrate surface as an extension of the ASD toolbox for metal-on-metal deposition.Funding: Swedish Research Council (VR)Swedish Research Council [2015-03803, 2019-05055]; Swedish Foundation for Strategic Research (SSF)Swedish Foundation for Strategic Research [SSF-RMA 15-0018]; Lam Research Corporation</p