Macroporous silicon (MPS) is a versatile material that since its origin in the early 1990s has seen intense research and has found applications in many fields. MPS is a key technology in photonic crystals research, and optic and photonic applications are its main applications. However, this chapter is devoted to several of the non‐photonic uses of MPS. In particular, new electronic and MEMS devices and applications will be described. Furthermore, in this chapter, the technology of MPS fabrication will be presented

Bru, Didac Vega

Martínez, Ángel Rodríguez

English

The knowledge of fundamental silicon questions and all aspects of silicon technology gives the possibility of improvement to both initial silicon material and devices on silicon basis. The articles for this book have been contributed by the much respected researchers in this area and cover the most recent developments and applications of silicon technology and some fundamental questions. This book provides the latest research developments in important aspects of silicon including nanoclusters, solar silicon, porous silicon, some technological processes, and silicon devices and also fundamental question about silicon structural perfection. This book is of interest both to fundamental research and to practicing scientists and also will be useful to all engineers and students in industry and academia.Peer Reviewe

Vega Bru, Didac

Rodríguez Martínez, Ángel

UPCommons

Macroporous silicon. Technology and applications

IntechOpen

Macroporous Silicon: Technology and Applications

The knowledge of fundamental silicon questions and all aspects of silicon technology gives the possibility of improvement to both initial silicon material and devices on silicon basis. The articles for this book have been contributed by the much respected researchers in this area and cover the most recent developments and applications of silicon technology and some fundamental questions. This book provides the latest research developments in important aspects of silicon including nanoclusters, solar silicon, porous silicon, some technological processes, and silicon devices and also fundamental question about silicon structural perfection. This book is of interest both to fundamental research and to practicing scientists and also will be useful to all engineers and students in industry and academia.Peer ReviewedPostprint (published version

Macroporous Silicon: Technology and Applications

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