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Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam
Authors
Jianwu Zhang
Zengming Zhang
Zhongping Wang
Publication date
2 December 2011
Publisher
'IntechOpen'
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oai:intechopen.com:24491
Last time updated on 07/05/2020