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Sputtered AlN Thin Films for Piezoelectric MEMS Devices - FBAR Resonators and Accelerometers
Authors
Dean Samara-Rubio
Eyal Ginsburg
+5Ā more
Friedel Gerfers
Li-PengWang
Ming Yuan He
Peter M. Kohlstadt
Yiannos Manoli
Publication date
1 January 2010
Publisher
'IntechOpen'
Doi
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Abstract
Abstract is not available.
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oai:intechopen.com:6503
Last time updated on 07/05/2020
