The activity of piezoelectric material linked the applied electric field with the strain generated that can be translated into geometrical variations. Flexible steel substrate exhibits fascinating mechanical properties which enable their integration into the emerging field of flexible microelectronics. This work presents an extended technique based on capacitance-voltage dependency to extract the geometrical variations in thin-film piezoelectric materials deposited on a flexible steel. A 50 μm flexible steel sheet has been sandwiched by two PZT film layers, each of 2.4 μm in thickness deposited by sputtering. An aluminum layer of 370 nm has been deposited above each PZT layer to form the electrical contact. The steel sheet represents the common electrode for both PZT structures. Gamry references 3000 analyzers were used to collect the capacitance-voltage measurements then estimating the piezoelectric charge constant. Experimental work has been validated by implementing the same method on a bulk piezoelectric film. Results have shown that the measured capacitance varies by 1% due to dielectric constant voltage dependency. On the other hand, 99% of capacitance variations depend on the change in physical dimensions of the sample via the piezoelectric effect. Further to that, this thesis explores the utilization of piezoelectric-based sensors to collect a corresponding representative signal from the chest surface. The subject typically needs to hold his or her breath to eliminate the respiration effect. This work further contributes to the extraction of the corresponding representative vital signs directly from the measured respiration signal. The contraction and expansion of the heart muscles, as well as the respiration activities, will induce a mechanical vibration across the chest wall. This vibration can be converted into an electrical output voltage via piezoelectric sensors. During breathing, the measured voltage signal is composed of the cardiac cycle activities modulated along with the respiratory cycle activity. The proposed technique employs the principles of piezoelectric and signal-processing methods to extract the corresponding signal of cardiac cycle activities from a breathing signal measured in real-time. All the results were validated step by step by a conventional apparatus, with good agreement observed
