Ultrahigh -precision positioning devices are essential in precision engineering and microsystems’ technologies. As they need to allow sub- micrometric or even nanometric displacements, their nonlinear frictional behaviour, induced by a number of sliding and rolling components, has to be efficiently compensated for. If a model-based approach is followed, suitable modelling of such disturbances, which is generally performed using state-of the art friction models, has to be performed. An overview of different compensation and control algorithms applied to ultrahigh-precision positioning systems is hence given in this work
