ABSTRACT This paper presents a model to analyze contact phenomenon in microsystems, actuated by ramp voltages, which has applications in frequency sweeping. First-order shear deformation theory is used to model dynamical system using finite element method, while finite difference method is applied to model squeeze film damping. The model is validated by static pull-in results. The presented hybrid FEM-FDM model is utilized to compute values of contact time and dynamic behavior. Considering this model, effects of different geometrical and mechanical parameters on contact time are studied. The influence of imposing the additional reverse voltage on dynamic characteristics of the system is also investigated. It is shown that magnitude and position of applying the reverse voltage is very important in preventing pull-in instability
