ABSTRACT In this paper, we propose a novel statistical capacitance extraction method for interconnects considering process variations. The new method, called statCap, is based on the spectral stochastic method where orthogonal polynomials are used to represent the statistical processes in a deterministic way. We first show how the variational potential coefficient matrix is represented in a first-order form using Taylor expansion and orthogonal decomposition. Then an augmented potential coefficient matrix, which consists of the coefficients of the polynomials, is derived. After that, corresponding augmented system is solved to obtain the variational capacitance values in the orthogonal polynomial form. Experimental results show that our method is two orders of magnitude faster than the recently proposed statistical capacitance extraction method based on the spectral stochastic collocation approac
