Proceedings of the 7 th International Workshop on Radiation Effects on Semiconductor Devices for Space Application Si Substrate Suitable for Radiation-Resistant Space Solar Cells

Abstract

Abstract Irradiating group-III (B, Al, Ga)-doped Czochralski (CZ)-grown Si substrates as well as B-doped magnetic Czochralski (MCZ)-grown and floating-zone (FZ)-grown Si substrates with 10 MeV protons or 1 MeV electrons, we investigate both the reduction in the hole concentration and the conversion of p-type to n-type using Hall-effect measurements. In all the 10 Ωcm CZ-Si, the density of each acceptor species is reduced by irradiation, and finally the conversion occurs with 1x10 17 cm -2 fluence of 1 MeV electrons or with 2.5x10 14 cm -2 fluence of 10 MeV protons. In 10 Ωcm MCZ-Si and 10 Ωcm FZ-Si, on the other hand, the conversion does not occur under the same irradiation conditions. Moreover, the reduction in the concentration for the FZ-Si is much less than the others. From these results, it is elucidated that the conversion as well as the reduction in the hole concentration is strongly dependent on the concentration of oxygen in Si, not on the type of acceptor species in Si. Therefore, the p-type FZ-Si substrate is appropriate for radiation-resistant space solar cells such as