ABSTRACT We will present a novel micromirror design in which tethered bimorph strips are used for mirror active alignment including beam steering and position fixing. A micromirror is attached to bimorphs that are pre-stressed at room temperature. A series of tethers link the bimorphs to the substrate to restrain their deformation. Breaking a tether by Joule heating allows the deformation of the bimorph to increase, changing the mirror position and orientation for precision alignment. With a large number of tethers, an optimum alignment can be achieved after breaking a selected group of tethers. We also report the experimental results of devices fabricated
