Phase transformation and paired-plate precipitate formation in Pb 0.91 La 0.09 Zr 0.65 Ti 0.35 O 3 films grown on sapphire substrates

Abstract

Abstract We report on the phase transformation behavior of Pb 0.91 La 0.09 Zr 0.65 Ti 0.35 O 3 (9/65/35) PLZT films grown on rsapphire substrates via rf-magnetron sputtering. A complex microstructure results in these films depending on deposition and annealing conditions. A random equiaxed polycrystalline grain morphology was observed after rapid thermal annealing or furnace annealing when the as-deposited films were predominantly pyrochlore. Precipitate formation (100-150 nm) was observed in PLZT films that were deposited at temperatures in excess of 4901C with a perovskite structure, after furnace annealing at 7001C. We believe that this is related to internal stresses in the films due to both the lattice mismatch and the thermal expansion mismatch between the PLZT film and the sapphire substrate.