Microsystems technology: objectives

This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is. This question is often posed and a simple answer is lacking, as a consequence of the diversity of subjects that are perceived as MST. The second reason is that a map of the somewhat chaotic field of MST is needed to identify sub-territories, for which standardization in terms of system modules an interconnections is feasible. To define the objectives a pragmatic approach has been followed. From the literature a selection of topics has been chosen and collected that are perceived as belonging to the field of MST by a large community of workers in the field (more than 250 references). In this way an overview has been created with `applications¿ and `generic issues¿ as the main characteristics

Korean Transnational Students’ School Adjustment: An Ecological Perspective

This research explored Korean early study abroad students’ school adjustment in the U.S., as well as how their microsystems (family, peer, school) affect their experiences. To understand their experience, we posed two research questions: 1) What are Korean early study abroad students’ experience like in adjusting to American middle schools? and 2) How do these students’ microsystems (family, peer, and school) affect their experiences in the process of adjustment? Four Korean early study abroad students participated in a collective case study. Each student was interviewed three times and observed in both their content area and ESL classes. All students described tremendous challenges in adjusting to their new school in the U.S. Specifically, their challenges were pertaining to different aspects of learning experiences as well as school belonging. While their limited English proficiency was a primary factor in these challenges, a lack of support from their peers, parents, teachers and school also seemed to affect their school adjustment. Moreover, findings indicated disconnections among their microsystems, contributing to a lack of support in their school adjustment

Moisture resistance of SU-8 and KMPR as structural material for integrated gaseous detectors

This paper treats the moisture resistance of SU-8 and KMPR, two photoresists considered as structural material in microsystems. Our experiments focus on the moisture resistance of newly developed radiation imaging detectors containing these resists. Since these microsystems will be used unpackaged, they are susceptible to all kinds of environmental conditions. Already after one day of exposure to a humid condition the structural integrity and adhesion of SU-8 structures, measured by a shear test is drastically reduced. KMPR photoresist shows much stronger moisture resistance properties, making it a suitable alternative in our application. © 2008 Elsevier Science. All rights reserved

Integrated microsystems for molecular pathology

We have integrated electronic, optical, magnetic, thermal and fluidic devices into systems to construct useful analysis tools. Over the past several years, we have developed soft lithography approaches to define microfluidic systems in which pico-Liter volumes can be manipulated. These fluidic delivery systems have more recently been integrated with optical and electronic devices. We have also developed thermal control systems with fast (>50oC/s) cooling and heating ramp speeds and excellent accuracy

Novel parameter estimation schemes in microsystems

This paper presents two novel estimation methods that are designed to enhance our ability of observing, positioning, and physically transforming the objects and/or biological structures in micromanipulation tasks. In order to effectively monitor and position the microobjects, an online calibration method with submicron precision via a recursive least square solution is presented. To provide the adequate information to manipulate the biological structures without damaging the cell or tissue during an injection, a nonlinear spring-mass-damper model is introduced and mechanical properties of a zebrafish embryo are obtained. These two methods are validated on a microassembly workstation and the results are evaluated quantitatively

A contact lens with built-in display: science fiction or not?

Recent progress in microsystems integration technology such as ultra-thin chip packaging, stretchable interconnections, thin-film batteries and organic photovoltaics makes it feasible to incorporate various electronic components and transducers in extremely confined spaces and inside flexible or conformable objects. Can this ultimately lead to a genuine display in a contact lens? The major outstanding issues are reviewed

Pyramidal micromirrors for microsystems and atom chips

Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micromirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into micro-optoelectromechanical systems and atom chips. We have shown that structures of this shape can be used to laser-cool and hold atoms in a magneto-optical trap

How to Upscale The Kinetics of Complex Microsystems

The rate constants of chemical reactions are typically inferred from slopes and intersection points of observed concentration curves. In small systems that operate far below the thermodynamic limit, these concentration profiles become stochastic and such an inference is less straightforward. By using elements of queuing theory, we introduce a procedure for inferring (time dependent) kinetic parameters from microscopic observations that are given by molecular simulations of many simultaneously reacting species. We demonstrate that with this procedure it is possible to assimilate the results of molecular simulations in such a way that the latter become descriptive on the macroscopic scale. As an example, we upscale the kinetics of a molecular dynamics system that forms a complex molecular network. Incidentally, we report that the kinetic parameters of this system feature a peculiar time and temperature dependences, whereas the probability of a network strand to close a cycle follows a universal distribution