Electrostatic actuation of silicon optomechanical resonators

Optomechanical systems offer one of the most sensitive methods for detecting mechanical motion using shifts in the optical resonance frequency of the optomechanical resonator . Presently, these systems are used for measuring mechanical thermal noise displacement or mechanical motion actuated by optical forces. Electrostatic capacitive actuation and detection have been shown previously for silicon micro electro mechanical resonators for application in filters and oscillators. Here, we demonstrate monolithic integration of electrostatic capacitive actuation with optical sensing using silicon optomechanical disk resonators and waveguides. The electrically excited mechanical motion is observed as an optical intensity modulation when the input electrical signal is at a frequency of 235MHz corresponding to the radial vibrational mode of the silicon microdisk

Flexible parylene actuator for micro adaptive flow control

This paper describes the first flexible parylene electrostatic actuator valves intended for micro adaptive flow control for the future use on the wings of micro-air-vehicle (MAV). The actuator diaphragm is made of two layers of parylene membranes with offset vent holes. Without electrostatic actuation, air can move freely from one side of the skin to the other side through the vent holes. With actuation, these vent holes are sealed and the airflow is controlled. The membrane behaves as a complete diaphragm. We have successfully demonstrated this function using a 2-mm x 2-mm parylene diaphragm electrostatic actuator valves. This work also includes the novel anti-stiction technology that is crucial to make such large-area parylene actuator diaphragm with the combined use of anti-stiction posts, self-assembled monolayers (SAM), surface roughening, and bromine trifluoride (BrFe) dry etching. With the help of SAM treatment, the operating voltage is lowered from 30 volts to 13 volts. The load deflection method is then used to measure the effective thickness of the composite diaphragm. The flexible parylene diaphragm can be deflected up to 100 μm when 150 Torr of pressure is applied. The result is fitted into a theoretical model and yields an effective thickness of 5.9 μm, which is agreeable with the actual thickness of 5.6 μm, thus proves the functionality of the device

Mems device with large out-of-plane actuation and low-resistance interconnect and methods of use

Source: United States Patent and Trademark Office, www.uspto.gov”The present application is directed to a MEMS device. The MEMS device includes a substrate having a first end and a second end extending along a longitudinal axis, the Substrate including an electrostatic actuator. The device also includes a movable plate having a first end and a second end. The device also includes a thermal actuator having a first end coupled to the first end of the substrate and a second end coupled to the first end of the plate. The actuator moves the plate in relation to the substrate. Further, the device includes a power source electrically coupled to the thermal actuator and the Substrate. The application is also directed to a method for operating a MEMS device

Sub-femto-g free fall for space-based gravitational wave observatories: LISA pathfinder results

We report the first results of the LISA Pathfinder in-flight experiment. The results demonstrate that two free-falling reference test masses, such as those needed for a space-based gravitational wave observatory like LISA, can be put in free fall with a relative acceleration noise with a square root of the power spectral density of 5.2 ± 0.1 fm s−2/√Hz or (0.54 ± 0.01) × 10−15 g/√Hz, with g the standard gravity, for frequencies between 0.7 and 20 mHz. This value is lower than the LISA Pathfinder requirement by more than a factor 5 and within a factor 1.25 of the requirement for the LISA mission, and is compatible with Brownian noise from viscous damping due to the residual gas surrounding the test masses. Above 60 mHz the acceleration noise is dominated by interferometer displacement readout noise at a level of (34.8 ± 0.3) fm/√Hz, about 2 orders of magnitude better than requirements. At f ≤ 0.5 mHz we observe a low-frequency tail that stays below 12 fm s−2/√Hz down to 0.1 mHz. This performance would allow for a space-based gravitational wave observatory with a sensitivity close to what was originally foreseen for LISA

Dependence of chaotic behavior on optical properties and electrostatic effects in double beam torsional Casimir actuation

We investigate the influence of Casimir and electrostatic torques on double beam torsional microelectromechanical systems with materials covering a broad range of conductivities of more than three orders of magnitude. For the frictionless autonomous systems, bifurcation and phase space analysis shows that there is a significant difference between stable and unstable operating regimes for equal and unequal applied voltages on both sides of the double torsional system giving rise to heteroclinic and homoclinic orbits, respectively. For equal applied voltages, only the position of a symmetric unstable saddle equilibrium point is dependent on the material optical properties and electrostatic effects, while in any other case there are stable and unstable equilibrium points are dependent on both factors. For the periodically driven system, a Melnikov function approach is used to show the presence of chaotic motion rendering predictions of whether stiction or stable actuation will take place over long times impossible. Chaotic behavior introduces significant risk for stiction, and it is more prominent to occur for the more conductive systems that experience stronger Casimir forces and torques. Indeed, when unequal voltages are applied, the sensitive dependence of chaotic motion on electrostatics is more pronounced for the highest conductivity systems.Comment: 24 pages, 11 figure

Low Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System

This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding anti-stiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF measurements are presented and preliminary experimental protocol and results of anti-stiction validation is detailed. Resulting RF performances are -30dB of isolation and -0.45dB of insertion loss at 10 GHz.Comment: Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838

Resistive damping implementation as a method to improve controllability in stiff ohmic RF-MEMS switches

This paper presents in detail the entire procedure of calculating the bias resistance of an ohmic RF-MEMS switch, controlled under resistive damping (charge drive technique). In case of a very stiff device, like the North Eastern University switch, the actuation control under resistive damping is the only way to achieve controllability. Due to the short switching time as well as the high actuation voltage, it is not practical to apply a tailored control pulse (voltage drive control technique). Implementing a bias resistor of 33 MΩ in series with the voltage source, the impact velocity of the cantilever has been reduced 80 % (13.2 from 65.9 cm/s), eliminating bouncing and high initial impact force during the pull-down phase. However, this results in an affordable cost of switching time increase from 2.38 to 4.34 μs. During the release phase the amplitude of bouncing has also been reduced 34 % (174 from 255 nm), providing significant improvement in both switching operation phases of the switch. © 2013 Springer-Verlag Berlin Heidelberg

Surface micromachined electrostatically actuated micro peristaltic pump

An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be isolated from the electric field. Electrostatic actuation of the parylene membrane using both DC and AC voltages was demonstrated and applied to fluid pumping based on a 3-phase peristaltic sequence. A maximum flow rate of 1.7 nL min^–1 and an estimated pumping pressure of 1.6 kPa were achieved at 20 Hz phase frequency. A dynamic analysis was also performed with a lumped-parameter model for the peristaltic pump. The analysis results allow a quantitative understanding of the peristaltic pumping operation, and correctly predict the trends exhibited by the experimental data. The small footprint of the micro pump is well suited for large-scale integration of microfluidics. Moreover, because the same platform technology has also been used to fabricate other devices (e.g. valves, electrospray ionization nozzles, filters and flow sensors), the integration of these different devices can potentially lead to versatile and functional micro total analysis systems (µTAS)