High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter

The development of a capacitive microphone with an integrated detection circuit is described. The condenser microphone is made by micromachining of polyimide on silicon. Therefore, the structure can be realized by postprocessing on substrates containing integrated circuits (IC's), independently of the IC process, integrated microphones with excellent performances have been realized on a CMOS substrate containing dc-dc voltage converters and preamplifiers. The measured sensitivity of the integrated condenser microphone was 10 mV/Pa, and the equivalent noise level (ENL) was 27 dB(A) re. 20 ¿Pa for a power supply voltage of 1.9 V, which was measured with no bias voltage applied to the microphone. Furthermore, a back chamber of infinite volume was used in all reported measurements and simulation

A high-temperature wideband pressure transducer

The problem of operating a condenser microphone as a terminal element of a half wavelength transmission line was dealt with; the environment in which the microphone operates necessitates a 25 foot separation from its supporting electronics. A theoretical analysis of the microphone-cable system, substantiated by laboratory tests, provided criteria to optimize system gain

A polymer condenser microphone on silicon with on-chip cmos amplifier

In this paper the development of a capacitive microphone with integrated preamplifier is described. The condenser microphone is made by micromachining of polyimide on silicon, and is compatible with CMOS technology. Therefore, the structure can be realised by post processing on substrates containing integrated circuits, independently of the IC process. Microphones with a required DC bias voltage of 4 V have been realised on a CMOS substrate containing PMOS buffer preamplifiers. From the measurements on these structures, it is illustrated how an immediate improvement of 4.8 dB of the microphone sensitivity and noise level can be obtained by using the integrated preamplifier. The measured sensitivity of the integrated condenser microphone was 2.5 mV/Pa and the equivalent noise level (ENL) was 29.5 dB(A) SP

Instrumentation for measuring aircraft noise and sonic boom

Improved instrumentation suitable for measuring aircraft noise and sonic booms is described. An electric current proportional to the sound pressure level at a condenser microphone is produced and transmitted over a cable and amplified by a zero drive amplifier. The converter consists of a local oscillator, a dual-gate field-effect transistor mixer, and a voltage regulator/impedance translator. The improvements include automatic tuning compensation against changes in static microphone capacitance and means for providing a remote electrical calibration capability

High-temperature microphone system

Pressure fluctuations in air or other gases in an area of elevated temperature are measured using a condenser microphone located in the area of elevated temperature and electronics for processing changes in the microphone capacitance located outside the area the area and connected to the microphone by means of high-temperature cable assembly. The microphone includes apparatus for decreasing the undesirable change in microphone sensitivity at high temperatures. The high temperature cable assembly operates as a half-wavelength transmission line in an AM carrier system and maintains a large temperature gradient between the two ends of the cable assembly. The processing electronics utilizes a voltage controlled oscillator for automatic tuning thereby increasing the sensitivity of the measuring apparatus

A unified acquisition system for acoustic data

A multichannel, acoustic AM carrier system was developed for a wide variety of applications, particularly for aircraft noise and sonic boom measurements. Each data acquisition channel consists of a condenser microphone, an acoustic signal converter, and a Zero Drive amplifier, along with peripheral supporting equipment. A control network insures continuous optimal tuning of the converter and permits remote calibration of the condenser microphone. With a 12.70-mm (1/2-in.) condenser microphone, the converter/Zero Drive amplifier combination has a frequency response from 0 Hz to 20 kHz (-3 db), a dynamic range exceeding 70 db, and a minimum noise floor of 50 db ref. 20 micro Pa) in the band 22.4 Hz to 22.4 kHz. The system requires no external impedance matching networks and is insensitive to cable length, at least up to 900 m (3,000 ft). System gain varies only + or - 1 db over the temperature range 4 to 54 C (40 to 130 F). Adapters are available to accommodate 23.77-mm (1-in.) and 6.35-mm (1/4-in.) microphones and to provide 30-db attenuation. A field test to obtain the acoustical time history of a helicopter flyover proved successful

High temperature fiber optic microphone having a pressure-sensing reflective membrane under tensile stress

A fiber optic microphone is provided for measuring fluctuating pressures. An optical fiber probe having at least one transmitting fiber for transmitting light to a pressure-sensing membrane and at least one receiving fiber for receiving light reflected from a stretched membrane is provided. The pressure-sensing membrane may be stretched for high frequency response. Further, a reflecting surface of the pressure-sensing membrane may have dimensions which substantially correspond to dimensions of a cross section of the optical fiber probe. Further, the fiber optic microphone can be made of materials for use in high temperature environments, for example greater than 1000 F. A fiber optic probe is also provided with a backplate for damping membrane motion. The backplate further provides a means for on-line calibration of the microphone

Fiber optic microphone having a pressure sensing reflective membrane and a voltage source for calibration purpose

A fiber optic microphone is provided for measuring fluctuating pressures. An optical fiber probe having at least one transmitting fiber for transmitting light to a pressure-sensing membrane and at least one receiving fiber for receiving light reflected from a stretched membrane is provided. The pressure-sensing membrane may be stretched for high frequency response. Further, a reflecting surface of the pressure-sensing membrane may have dimensions which substantially correspond to dimensions of a cross section of the optical fiber probe. Further, the fiber optic microphone can be made of materials for use in high temperature environments, for example greater than 1000 F. A fiber optic probe is also provided with a back plate for damping membrane motion. The back plate further provides a means for on-line calibration of the microphone

Modelling of silicon condenser microphones

Several models concerning the sensitivity of capacitive pressure sensors have been presented in the past. Modelling of condenser microphones, which can be considered to be a special type of capacitive pressure sensor, usually requires a more complicated analysis of the sensitivity, because they have a strong electric field in the air gap. It is found that the mechanical sensitivity of condenser microphones with a circular diaphragm, either with a large initial tension or without any initial tension, increases with increasing bias voltage (and the corresponding static deflection), whereas the mechanical sensitivity of other capacitive pressure sensors does not depend on the static deflection. It is also found that the mechanical sensitivity increases with increasing input capacitance of a preamplifier. In addition, the open-circuit electrical sensitivity and, consequently, the total sensitivity too, also increases with increasing bias voltage (or static deflection). However, the maximum allowable sound pressure at which the diaphragm collapses, an effect that has to be taken into account, decreases with increasing static deflection in most cases, ulthnately resulting in an optimum value for the bias voltage. The model for microphones with a circular highly tensioned diaphragm has been verified successfully for two microphone types