69 research outputs found
The Increase in Thickness Uniformity of Films Obtained by Magnetron Sputtering with Rotating Substrate
The titanium thin films obtained by magnetron sputtering with the rotating substrate at different distances between the substrate and magnetron centers were studied with regard to the uniformity of the film thickness distribution. On the basis of the experimental data obtained, the model for the magnetron film deposition during substrate rotation was developed. The analysis of the simulation results shows that the model error is not greater than 10%
Optical and Tribological Properties of PVD/CVD Diamond-like Carbon Films
The optical and tribological properties of diamond-like carbon (DLC) films deposited by the combination of magnetron sputtering of graphite and plasmochemical dissociation of methane were studied. It was established that at methane concentration in the gas mixture Ar/CH4 at about 5–10 % the formation of DLC films with refraction index n 2.0, microhardness larger than 1000 HK and friction coefficient of 0.06–0.08 becomes possible
Research of the alkylation process of phenol by tetramers of propylene on ion-exchange smols
The article is described the regularity of phenol alkylation process by tetramers of propylene by ion exchange catalyst. This process possesses a current interest in manufacturing of phenol engine additive. Reaction’s conversion and selectivity were estimated in different circumstances
Phenol alkylation by ?-olefins on purpose to receive raw materials for production of multipurpose alkylphenol additives to oils
The article describes mechanisms of phenol alkylation by ?-olefins and some modern and the most effective catalysts which are used for phenol alkylation on purpose to receive raw materials for production of multipurpose alkylphenol additives to oil
Research of the alkylation process of phenol by tetramers of propylene on ion-exchange smols
The article is described the regularity of phenol alkylation process by tetramers of propylene by ion exchange catalyst. This process possesses a current interest in manufacturing of phenol engine additive. Reaction’s conversion and selectivity were estimated in different circumstances
Optical and Tribological Properties of PVD/CVD Diamond-like Carbon Films
The optical and tribological properties of diamond-like carbon (DLC) films deposited by the combination of magnetron sputtering of graphite and plasmochemical dissociation of methane were studied. It was established that at methane concentration in the gas mixture Ar/CH4 at about 5–10 % the formation of DLC films with refraction index n 2.0, microhardness larger than 1000 HK and friction coefficient of 0.06–0.08 becomes possible
Reflective optical characteristics of planar film with the nanoscale inner structure formed via anodizing of Al/Nb layers on glass
Planar film with nanoscale inner structure via anodizing Al/Nb layers on glass showed several distinct maxima on the reflection curve in the regions of 320, 380, and 850 nm corresponding to forbidden photonic bands
ВЛИЯНИЕ ВЗАИМОДЕЙСТВИЯ МЕЖДУ ИЗЛУЧАТЕЛЯМИ НА ПАРАМЕТРЫ ВЫПУКЛОЙ АНТЕННОЙ РЕШЕТКИ С ДВОЙНОЙ КРИВИЗНОЙ
In the article the mutual coupling between radiators influence on electrical parameters of convex antenna array with doubly curved radiators placement surface is investigated. Yagi-Uda antennas are used as radiators. The integral equations method is incorporated. В статье исследуется влияние взаимодействия между излучателями на электрические параметры выпуклой антенной решетки с двойной кривизной поверхности размещения излучателей. В качестве излучателей решетки использованы директорные антенны. Применен метод интегральных уравнений.
Influence of the annealing temperature on the ferroelectric properties of niobium-doped strontium–bismuth tantalate
Characteristics of ferroelectric thin films of nio-bium-doped strontium–bismuth tantalite (SBTN), which were deposited by magnetron sputtering on Pt/TiO2/SiO2/Si substrates, are investigated. To form the ferroelectric structure, deposited films were subjected to subsequent annealing at 700–800°C in an O2 atmosphere. The results of X-ray diffraction showed that the films immediately after the deposition have
an amorphous structure. Annealing at 700–800°C results in the formation of the Aurivillius struc-ture. The dependences of permittivity, residual polariza-tion, and the coercitivity of SBTN films on the modes of subsequent annealing are established. Films with residual polarization 2Pr = 9.2 μC/cm2, coercitivity 2Ec = 157 kV/cm, and leakage current 10–6 A/cm2 are obtained at the annealing temperature of 800°C. The dielectric constant and loss tangent at fre-quency of 1.0 MHz were ε = 152 and tanδ = 0.06. The ferroelectric characteristics allow us to use the SBTN films in the capacitor cell of high density ferroelectric random-access non-volatile memory (FeRAM)
- …