先端プロセス技術における混載SRAMの高信頼・低電力化に関する研究

13301甲第4843号博士（工学）金沢大学博士論文本文Ful

先端プロセス技術における混載SRAMの高信頼・低電力化に関する研究

13301甲第4843号博士（工学）金沢大学博士論文要旨Abstrac

Feasibility of Ultra-Thin Films for Gate Insulator by Limited Reaction Sputtering Process

A new sputtering technique named "limited reaction sputtering" is proposed and the feasibility toward an ultra-thin gate insulator is investigated. 5-10 nm thick ZrO 2 films were prepared on Si(100) substrates and analyzed by XPS, HR-RBS and RHEED. Significant Zr diffusion into the Si substrate and interface oxidation were not observed. An optimum film was obtained at growth temperature of 300°C, oxygen flow rate of 4.2% and 500°C-10 sec RTA. The equivalent oxide thickness of 2 nm was realized with leakage current of 10 -7 A/cm 2 at 1.5 MV/cm

Changes of behavior and consciousness in COVID-19

新型コロナウイルスの感染症の拡大と長期化に伴い，世の中はパンデミック状態にある一方でテレワークの普及によって，個人生活にとってはメリットもあると考えられる．そこで現在の行動やコミュニケーション等の意識の変化，さらにフレイルなど健康面の課題について①生活，行動と意識に関するアンケート，②通勤，勤務と行動と意識に関するアンケート2種類のWeb調査により実態を明らかにした．その結果，未知のウイルスに対する脅威感から，人々の意識やライフスタイルも大きく変容していて，在宅時間の増加によりメリットもある一方で，時間の使い方は自己への投資などには回っておらず，健康面では不安を抱えていることが明らかになり，フレイル等により健康寿命の短縮が危惧されるなど，新たな日常スタイルに向けての課題があることが明らかになった．With the spread and prolongation of the new coronavirus infection, the world is in a pandemic state, but the spread of telework is thought to have benefits for personal life. Therefore, awareness of current behavior and communication, etc. Regarding changes and health issues such as frailty, (1) questionnaires on life, behavior and consciousness, and (2) questionnaires on commuting work and behavior and consciousness, the actual situation was clarified by two types of Web surveys. As a result, people's consciousness and lifestyle have changed significantly due to the threat of unknown viruses, and while there are benefits to increasing the time spent at home, spending time is not used for self-investment. However, it became clear that he was worried about his health, and that there were issues for a new daily style, such as fear of shortening healthy life expectancy due to frailty syndrome

Trade and gains from trade between profit-maximizing and labour-managed countries with imperfect competition

SIGLEAvailable from Bibliothek des Instituts fuer Weltwirtschaft, ZBW, Duesternbrook Weg 120, D-24105 Kiel W 624 (97) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman