An ultra-thin PDMS membrane as a bio/micro-nano interface: fabrication and characterization

We report a method for making ultra-thin PDMS membrane devices. Freely suspended membranes as thin as 70 nm have been fabricated. Bulging tests were performed with a custom built fluidic cell to characterize large circular membranes. The fluidic cell allows the media (such as air or water) to wet one side of the membrane while maintaining the other side dry. Pressure was applied to the membrane via a liquid manometer through the fluidic cell. The resulting load-deflection curves show membranes that are extremely flexible, and they can be reproducibly loaded and unloaded. Such devices may potentially be used as mechanical and chemical sensors, and as a bio-nano/micro interface to study cellular mechanics in both static and dynamic environments

Bond-detach lithography: A method for micro/nanolithography by precision PDMS patterning

We have discovered a micro/nanopatterning technique based on the patterning of a PDMS membrane/film, which involves bonding a PDMS structure/stamp (that has the desired patterns) to a PDMS film. The technique, which we call "bond-detach lithography", was demonstrated (in conjunction with other microfabrication techniques) by transferring several micro- and nanoscale patterns onto a variety of substrates. Bond-detach lithography is a parallel process technique in which a master mold can be used many times, and is particularly simple and inexpensive

A dry film technology for the manufacturing of 3-D multi-layered microstructures and buried channels for lab-on-chip

The development of innovative and reliable techniques for devices miniaturization are enabling the massive growth of lab on chip (LOC) applications. In this article, we briefly review the technological options for LOC microfabrication, then we present the optimization of a process for the realization of tridimensional multi-layered structures and buried channels in a microfluidic network using a photo-patternable dry film, with a potential for LOC manufacturing. The tuning of all the fabrication parameters is widely discussed and micrographs and optical profiler images are reported to show fabrication results. The fabrication process is used for a Split-flow-thin (SPLITT) fractionation cell configuration. SPLITT is a particle fractionation technique based on the combined effect of two laminar streams (the sample containing the particles and a carrier) flowing inside a thin microchannel and the action of a vertical driving force for particle displacement. Since the SPLITT implemented in this work is electrically driven, patterned electrodes (thickness: 100 nm) are also integrated in the flow cell walls. The functionality of the cell was tested first verifying the presence of proper flow conditions for microfluidic SPLITT (absence of mixing between the streams) and then proving electrical fractionation with two different proteins (BSA and b-lactoglobulin) at different levels of ionic strength. The flow of the streams within the microfluidic channel was also simulated by a numerical 2-D model exactly reproducing the cell geometry, with a good accordance with experimental results