Novel four-point-probe design and nanorobotic dual endeffector strategy for electrical characterization of as-grown SWCNT bundles

In this paper, a novel nanorobotic strategy for non-destructive and direct electrical characterization of as-grown bundles of single-walled carbon nanotubes (SWCNTs) is presented. For this purpose, test patterns of SWCNT bundles having different diameters are grown on a silicon substrate by chemical vapor deposition. A new design of microstructured four-point-probes is proposed and fabricated allowing for direct contacting of vertically aligned bundles of SWCNTs. A nanorobotic setup is upgraded into a dual endeffector system to achieve good electrical contact between four-point-probe and SWCNT bundle and to perform electrical measurements. First experimental results of non-destructive electrical characterization are presented and discussed. ©2010 IEEE

Manipulation and in situ transmission electron microscope characterization of sub-100 nm nanostructures using a microfabricated nanogripper

We present here a polysilicon electrothermal microfabricated nanogripper capable of manipulating nanowires and nanotubes in the sub-100 nm range. The nanogripper was fabricated with a mix and match microfabrication process, combining high throughput of photolithography with 10 nm resolution of electron beam lithography. Vertically grown III-V nanowires with a diameter of 70 nm were picked up using the nanogripper, allowing direct transfer of the nanogripper-nanowire ensemble into a transmission electron microscope (TEM) for structural characterization. By refining the end-effectors with focused ion beam milling and subsequently coating these with Au, the nanogripper could lift up laterally aligned single-walled carbon nanotubes from a 1 νm wide trench, while immediately making good electrical contact. One such carbon nanotube was structurally and electrically characterized real-time in TEM, showing a breakdown current density of approximately 0.5 × 1012Am -2. The nanogripper is the smallest microfabricated gripper to date and is the first tool showing repeatable, 3D nanomanipulation of sub-100 nm structures. © 2010 IOP Publishing Ltd