Tip-enhanced Raman spectroscopy for suspended graphene integrated with silicon nanowire array

Local chemical and mechanical properties of suspended graphene structure integrated with an array of slicon nanowires (SiNW) are investigated by employing Tip-Enhanced Raman Spectroscopy (TERS). Clear difference in the shift of the major graphene peak positions is observed between Raman spectra without the tip and TERS spectra across the graphene located on the edge of the SiNW underneath. Localised defects that might be induced by the graphene transfer on the array are identified with the spatial resolution of approximately 100nm by the analysis of the peak intensity ratio. The results suggest that TERS is a promising technology for further improvement of graphene-based nanoelectromechanical device fabrication processes