Modeling and Optimization of Chemical Mechanical Planarization (Cmp) Using Neural Networks, Anfis and Evolutionary Algorithms

Higher density nano-devices and more metallization layers in microelectronic chips are unceasing goals to the present semiconductor industry. However, topological imperfections (higher non-uniformity) on the wafer surfaces and lower material removal rates (MRR) seriously hamper these pursuing motivations. Since'90, industry has been using chemical mechanical planarization/polishing (CMP) to overcome these obstacles for fabricating integrated circuits (IC) with interconnect geometries of < 0.18 &amp;#956;m. Obviously, the much needed understanding of this new technique is derived basically on the ancient lapping process. Modeling and simulation are critical to transfer CMP from an engineering 'art' to an engineering 'science'. Many efforts in CMP modeling have been made in the last decade, but the available analytical MRR and surface uniformity models cannot precisely describe this highly complicated process, involving simultaneous chemical reactions (and etching), and mechanical abrasion. In this investigation, neural networks (NN), adaptive-based-network fuzzy inference system (ANFIS), and evolutionary algorithms (EA) techniques were applied to successfully overcome the aforementioned modeling and simulation problems. In addition, fine-tuning techniques for re-modifying ANFIS models for sparse-data case using are developed. Furthermore, multi-objective evolutionary algorithms (MOEA) are firstly applied to search for the optimal input settings for CMP process to trade-off the higher MRR and lower non-Uniformity by using the previously constructed models. The results also show the simulation of MOEA optimization can certainly provide accurate guidance to search the optimal input settings for CMP process to produce lower non-uniform wafer surfaces under higher MRR.Mechanical & Aerospace Engineerin

THE LONG -TERM VARIATION OF ORGANIC CHARACTERISTICS IN DONGGANG RIVER USING EXCITATION EMISSION FLUORESCENT MATRIX (EEFM) INTEGRATED WITH PARALLEL FACTOR ANALYSIS (PARAFAC)

In this study, Excitation Emission Fluorescent matrix (EEFM) integrated with Parallel factor analysis (PARAFAC) was applied to investigate the variation of organic property in Donggang River located in Southern Taiwan between Oct. 2010 and Oct. 2015. It reveals that both values of BOD5and COD had a closer proximity at twice samplings; however, the four main components in both samplings showed a different location of excitation and emission wavelengths. On Oct., 2010, EX/EM (percentage of area) of four components were respectively 320/410 nm (46 %), 370/460 nm (27 %), 290/350 nm (14 %) and 280/450 nm (13 %) mainly belonging to humic-like substance. Regrading to the result on Oct, 2015, 320/420 nm (29 %), 228,278/358 nm (29 %), 240/420(29 %) nm and 228/310 nm (14 %) were found attributed in amino organic substance with low excitation wavelength. On Oct.2015, the intensities of four main components in Cinsheda Bridge higher than those in other locations may be attributed with of heavily polluted source like piggery wastewater. For the partition of N-organic and C-organic, there had a significant change on both samplings

Biomechanical comparison of lumbar spine instability between laminectomy and bilateral laminotomy for spinal stenosis syndrome – an experimental study in porcine model

<p>Abstract</p> <p>Background</p> <p>The association of lumbar spine instability between laminectomy and laminotomy has been clinically studied, but the corresponding <it>in vitro </it>biomechanical studies have not been reported. We investigated the hypothesis that the integrity of the posterior complex (spinous process-interspinous ligament-spinous process) plays an important role on the postoperative spinal stability in decompressive surgery.</p> <p>Methods</p> <p>Eight porcine lumbar spine specimens were studied. Each specimen was tested intact and after two decompression procedures. All posterior components were preserved in Group A (Intact). In Group B (Bilateral laminotomy), the inferior margin of L4 lamina and superior margin of L5 lamina were removed, but the L4–L5 supraspinous ligament was preserved. Fenestrations were made on both sides. In Group C (Laminectomy) the lamina and spinous processes of lower L4 and upper L5 were removed. Ligamentum flavum and supraspinous ligament of L4–L5 were removed. A hydraulic testing machine was used to generate an increasing moment up to 8400 N-mm in flexion and extension. Intervertebral displacement at decompressive level L4–L5 was measured by extensometer</p> <p>Results</p> <p>The results indicated that, under extension motion, intervertebral displacement between the specimen in intact form and at two different decompression levels did not significantly differ (<it>P </it>> 0.05). However, under flexion motion, intervertebral displacement of the laminectomy specimens at decompression level L4–L5 was statistically greater than in intact or bilateral laminotomy specimens (<it>P </it>= 0.0000963 and <it>P </it>= 0.000418, respectively). No difference was found between intact and bilateral laminotomy groups. (<it>P </it>> 0.05).</p> <p>Conclusion</p> <p>We concluded that a lumbar spine with posterior complex integrity is less likely to develop segment instability than a lumbar spine with a destroyed anchoring point for supraspinous ligament.</p

Anti-Oxidative Abilities of Essential Oils from Atractylodes ovata Rhizome

The rhizome of Atractylodes ovata De Candolle is rich in essential oils, which are usually removed by processing. In this study, anti-oxidative abilities of essential oils and aqueous extracts of A. ovata rhizome were explored, and the influence of processing on the anti-oxidative abilities was examined. Essential oils and aqueous extracts of A. ovata were extracted by boiling water and steam distillation, respectively. Quality of these two A. ovata samples was controlled by HPLC and GC-MS system, and anti-oxidative abilities were then evaluated. Results showed that surface color of A. ovata turned to brown and chemical components were changed by processing. Contents of both atractylon and atractylenolide II decreased in the essential oils, but only the contents of atractylon decreased by processing. Atractylenolide III increased in both A. ovata samples. However, A. ovata essential oils displayed stronger anti-oxidative abilities than aqueous extracts in DPPH-scavenging, TBH-induced lipid peroxidation and catalase activity assays. Moreover, the bioactivity of essential oils from raw A. ovata was stronger than oils from processed A. ovata. On the other hand, cytotoxicity of A. ovata essential oils was stronger than that of aqueous extracts, and was more sensitive on H9C2 cell than NIH-3T3 and WI-38 cells. In contrast, stir-frying processing method increased cytotoxicity of essential oils, but the cytotoxicity was ameliorated when processed with assistant substances. The results suggested that phytochemical components and bioactivity of A. ovata were changed after processing and the essential oils from raw A. ovata showed better anti-oxidative and fewer cytotoxicity effects

Hypothermic manipulation of bone cement can extend the handling time during vertebroplasty

BACKGROUND: Polymethylmethacrylate (PMMA) is commonly used for clinical applications. However, the short handling time increases the probability of a surgeon missing the crucial period in which the cement maintains its ideal viscosity for a successful injection. The aim of this article was to illustrate the effects a reduction in temperature would have on the cement handling time during percutaneous vertebroplasty. METHODS: The injectability of bone cement was assessed using a cement compressor. By twisting the compressor, the piston transmits its axial load to the plunger, which then pumps the bone cement out. The experiments were categorized based on the different types of hypothermic manipulation that were used. In group I (room temperature, sham group), the syringes were kept at 22°C after mixing the bone cement. In group 2 (precooling the bone cement and the container), the PMMA powder and liquid, as well as the beaker, spatula, and syringe, were stored in the refrigerator (4°C) overnight before mixing. In group 3 (ice bath cooling), the syringes were immediately submerged in ice water after mixing the bone cement at room temperature. RESULTS: The average liquid time, paste time, and handling time were 5.1 ± 0.7, 3.4 ± 0.3, and 8.5 ± 0.8 min, respectively, for group 1; 9.4 ± 1.1, 5.8 ± 0.5, and 15.2 ± 1.2 min, respectively, for group 2; and 83.8 ± 5.2, 28.8 ± 6.9, and 112.5 ± 11.3 min, respectively, for group 3. The liquid and paste times could be increased through different cooling methods. In addition, the liquid time (i.e. waiting time) for ice bath cooling was longer than for that of the precooling method (p < 0.05). CONCLUSIONS: Both precooling (i.e. lowering the initial temperature) and ice bath cooling (i.e. lowering the surrounding temperature) can effectively slow polymerization. Precooling is easy for clinical applications, while ice bath cooling might be more suitable for multiple-level vertebroplasty. Clinicians can take advantage of the improved injectability without any increased cost

Pullout strength of pedicle screws with cement augmentation in severe osteoporosis: A comparative study between cannulated screws with cement injection and solid screws with cement pre-filling

<p>Abstract</p> <p>Background</p> <p>Pedicle screws with PMMA cement augmentation have been shown to significantly improve the fixation strength in a severely osteoporotic spine. However, the efficacy of screw fixation for different cement augmentation techniques, namely solid screws with retrograde cement pre-filling versus cannulated screws with cement injection through perforation, remains unknown. This study aimed to determine the difference in pullout strength between conical and cylindrical screws based on the aforementioned cement augmentation techniques. The potential loss of fixation upon partial screw removal after screw insertion was also examined.</p> <p>Method</p> <p>The Taguchi method with an L₈array was employed to determine the significance of design factors. Conical and cylindrical pedicle screws with solid or cannulated designs were installed using two different screw augmentation techniques: solid screws with retrograde cement pre-filling and cannulated screws with cement injection through perforation. Uniform synthetic bones (test block) simulating severe osteoporosis were used to provide a platform for each screw design and cement augmentation technique. Pedicle screws at full insertion and after a 360-degree back-out from full insertion were then tested for axial pullout failure using a mechanical testing machine.</p> <p>Results</p> <p>The results revealed the following 1) Regardless of the screw outer geometry (conical or cylindrical), solid screws with retrograde cement pre-filling exhibited significantly higher pullout strength than did cannulated screws with cement injection through perforation (<it>p </it>= 0.0129 for conical screws; <it>p </it>= 0.005 for cylindrical screws). 2) For a given cement augmentation technique (screws without cement augmentation, cannulated screws with cement injection or solid screws with cement pre-filling), no significant difference in pullout strength was found between conical and cylindrical screws (<it>p ></it>0.05). 3) Cement infiltration into the open cell of the test block led to the formation of a cement/bone composite structure. Observations of the failed specimens indicated that failure occurred at the composite/bone interface, whereas the composite remained well bonded to the screws. This result implies that the screw/composite interfacial strength was much higher than the composite/bone interfacial strength. 4) The back-out of the screw by 360 degrees from full insertion did not decrease the pullout strength in any of the studied cases. 5) Generally, larger standard deviations were found for the screw back-out cases, implying that the results of full insertion cases are more repeatable than those of the back-out cases.</p> <p>Conclusions</p> <p>Solid screws with retrograde cement pre-filling offer improved initial fixation strength when compared to that of cannulated screws with cement injection through perforation for both the conically and cylindrically shaped screw. Our results also suggest that the fixation screws can be backed out by 360 degrees for intra-operative adjustment without the loss of fixation strength.</p

Morus alba and active compound oxyresveratrol exert anti-inflammatory activity via inhibition of leukocyte migration involving MEK/ERK signaling

Background: Morus alba has long been used in traditional Chinese medicine to treat inflammatory diseases;however, the scientific basis for such usage and the mechanism of action are not well understood. This studyinvestigated the action of M. alba on leukocyte migration, one key step in inflammation.Methods: Gas chromatography-mass spectrometry (GC-MS) and cluster analyses of supercritical CO2 extractsof three Morus species were performed for chemotaxonomy-aided plant authentication. Phytochemistry andCXCR4-mediated chemotaxis assays were used to characterize the chemical and biological properties of M. albaand its active compound, oxyresveratrol. fluorescence-activated cell sorting (FACS) and Western blot analyses wereconducted to determine the mode of action of oxyresveratrol.Results: Chemotaxonomy was used to help authenticate M. alba. Chemotaxis-based isolation identifiedoxyresveratrol as an active component in M. alba. Phytochemical and chemotaxis assays showed that the crudeextract, ethyl acetate fraction and oxyresveratrol from M. alba suppressed cell migration of Jurkat T cells in responseto SDF-1. Mechanistic study indicated that oxyresveratrol diminished CXCR4-mediated T-cell migration via inhibitionof the MEK/ERK signaling cascade.Conclusions: A combination of GC-MS and cluster analysis techniques are applicable for authentication of theMorus species. Anti-inflammatory benefits of M. alba and its active compound, oxyresveratrol, may involve theinhibition of CXCR-4-mediated chemotaxis and MEK/ERK pathway in T and other immune cells

Evaluation of Antioxidant and Free Radical Scavenging Capacities of Polyphenolics from Pods of Caesalpinia pulcherrima

Thirteen polyphenolics were isolated from fresh pods of Caesalpinia pulcherrima using various methods of column chromatography. The structures of these polyphenolics were elucidated as gallic acid (1), methyl gallate (2), 6-O-galloyl-d-glucoside (3), methyl 6-O-galloyl-β-d-glucoside (4), methyl 3,6-di-O-galloyl-α-d-glucopyranoside (5), gentisic acid 5-O-α-d-(6′-O-galloyl)glucopyranoside (6), guaiacylglycerol 4-O-β-d-(6′-O-galloyl)glucopyranoside (7), 3-methoxy-4-hydroxyphenol 1-O-β-d-(6′-O-galloyl) glucopyranoside (8), (+)-gallocatechin (9), (+)-catechin (10), (+)-gallocatechin 3-O-gallate (11), myricetin 3-rhamnoside (12), and ampelopsin (13). All isolated compounds were tested for their antioxidant activities in the 1,1-diphenyl-2-picrylhydrazyl (DPPH), hydroxyl, and peroxynitrite radicals scavenging assays. Among those compounds, 11, 12, and 2 exhibited the best DPPH-, hydroxyl-, and peroxynitrite radical-scavenging activities, respectively. Compound 7 is a new compound, and possesses better scavenging activities towards DPPH but has equivalent hydroxyl radical scavenging activity when compared to BHT. The paper is the first report on free radical scavenging properties of components of the fresh pods of Caesalpinia pulcherrima. The results obtained from the current study indicate that the free radical scavenging property of fresh pods of Caesalpinia pulcherrima may be one of the mechanisms by which this herbal medicine is effective in several free radical mediated diseases