Forschungsvorhaben zur Auslegung eines Excimerlasers von ueber 1 kW Ausgangsleistung sowie Untersuchung des Anwendungsbereiches Abschlussbericht

Excimer lasers with 100 W output power were available at project begin. The components of these lasers fulfilled the lifetime requirements for industrial application in some cases only. Detailed design experiments for the high voltage excitation circuit were performed. The gas purification system was investigated and modified for high power level. Numerous individual laser components were improved and tested. The relevant safety rules were studied and realized. All components were evaluated in extensive lifetime tests. These tests and studies led to a design concept of an industrialized 1 kW excimer laser which can achieve lifetimes of more than a billion pulses for all components. Application tests with several 100 W output power on plastics, metals, and ceramics showed that very high power can improve throughput without detrimental effectsAvailable from TIB Hannover: F93B1327+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman

Materialbearbeitung mit Excimerlasern Teilvorhaben: Untersuchung zur industriellen Umsetzung von Excimerlaserstrahlungswechselwirkungen mit verschiedenen Materialien. Schlussbericht

Parameter studies concerning excimer based material processing were performed. The materials and samples were selected by industrial users who were looking for new micromachining processes. This strategy allowed to collect technical data and, in parallel, to discuss and understand the industrial and economical relevance of excimer based micromachining applications. The project results provide data for excimer based micromachining of ceramics, polymers and metals. Important phenomena were found, e.g. the influence of assist processing gas on the ablation rate for polyimide and ceramic machining. Also the still underestimated influence of UV-illumination optics (beam forming, homogenization) and its relation to imaging optics were investigated. This resulted in important design rules to apply for excimer based UV-optical systems for micromachining. The application of excimer lasers to new manufacturing still is critical from an economic point of view: Process development is very complex and needs cooperation of physicists, optical process and equipment engineers. The technical process advantages and micromachining quality compensate the high costs only in a few cases. Excimer laser based equipment for manufacturing needs to be developed. A real equipment for complete machines does not exist. The results of the project provide data to support the development of excimer based processes. Most important is that the process related parameter set is not only wavelength and energy density, but consists of many more specific material, optical and geometrical parameters. (orig.)Es wurden Projektstudien zur Materialwechselwirkung mit Excimerlaserstrahlung durchgefuehrt. Dabei wurden Daten zur Bearbeitung von Keramiken, Metallen und Kunststoffen erarbeitet, prozessrelevante Phaenomene zu Abtragraten bei der Keramikbearbeitung und bei der Polyimidbearbeitung unter Schutzgasatmosphaere entdeckt, die Bedeutung von UV-Beleuchtungsoptiken (Strahlformung, Homogenisierung) und UV-Abbildungssystemen untersucht. Die Anwendung von Excimerlaserstrahlung in neuen Fertigungstechniken ist noch immer aus wirtschaftlicher Sicht kritisch zu beurteilen. Die Gruende dafuer liegen im folgenden: Verfahrensentwicklung laeuft nur in Ausnahmen bei spaeteren Nutzern der neuen Fertigungstechnik ab, da die wissenschaftlich/technische Komplexitaet sehr hoch ist. Interdisziplinaere Arbeitsgruppen sind gefordert. Technische Vorteile von excimerlasergestuetzten Verfahren kompensieren nur in Ausnahmefaellen die kalkulierbaren, aber hohen Investitions- und Betriebskosten. Excimerlasergestuetzte Fertigungsmaschinen muessen entwickelt werden. Es gibt keine Anbieterstruktur. Die gewonnenen Daten und Erfahrungen sind der Umsetzung von excimerlasergestuetzten Prozessen foerderlich. Die Erfassung wichtiger Laserstrahlparameter als prozessrelevante Faktoren stellt hierbei neben den allgemeinen Prozessparametern (Energiedichte, Wellenlaenge) die wichtigste Erkenntnis dar. Damit ist es moeglich, die Konzeption von Strahlfuehrungen und Prozessanforderungen zueinander in Beziehung zu setzen. (orig./MM)Available from TIB Hannover: F93B1326+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman

BTX- und PAK-Sensor. Teilvorhaben: 266 nm Festkoerperlaser Abschlussbericht

SIGLEAvailable from TIB Hannover: F00B866+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung und Forschung (BMBF), Bonn (Germany)DEGerman

UV-Laserphotonentechnologie. OPUS II - Voraussetzungen fuer anwendungsorientierte Optimierung von UV-Strahlquellen und -Schichtoptiken. Teilprojekt: Verbesserung von Excimerlaser-Strahleigenschaften und Langzeitstabilitaet Abschlussbericht

SIGLEAvailable from TIB Hannover: F01B320+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung und Forschung, Berlin (Germany)DEGerman

Analyse neuartiger Kristallstrukturen unter dem Einfluss hoher spektraler Leistungsdichte. Grundlegende Untersuchungen zu diodengepumpten Laseroszillator-Verstaerkersystemen mit Frequenzverdopplung bei hohen Repetitionsraten Abschlussbericht

Presently extensive efforts are made to develop diode pumped solid state laser systems with high repetition rate, high single pulse energy, TEM_#propor to# beam quality and high pulse to pulse stability. These developments are performed with the aim of industrial application of such laser systems mainly in the field of micro material processing. Aim of the project was to close the technology gap between Germany and the USA and Japan and if possible to take over the technological leadership in this special field of diode pumped solid state laser systems. A diode pumped, Q-switched Nd:YAG laser system was realized, which delivers single longitudinal mode laser pulses with TEM_#propor to# beam quality and high pulse to pulse and long term stability. By means of an oscillator - amplifier arrangement laser pulses at 1064 nm with a repetition rate of 1000 Hz and an average power of 47 W could be achieved. Furthermore laser pulses with a pulse energy of more than 100 mJ and a repetition rate of 300 Hz could be generated. By Second Harmonic Generation pulses at 532 nm wavelength with a pulse energy of 20 mJ at 1000 Hz repetition rate could be achieved. All results are international records with this type of laser systems. The results of the project could be used for the development of a commercial diode pumped and Q-switched Nd:YAG laser with high pulse repetition rate. This laser is a leading product on the world market. He is suitable for material processing, as well as for applications in spectroscopy and research. (orig.)Available from TIB Hannover: F99B306+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman

Untersuchung und Optimierung von Komponenten fuer Hochleistungs-Excimerlaser (TRANSFORM) Schlussbericht

SIGLEAvailable from TIB Hannover: DtF QN1(85,17) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung und Forschung, Berlin (Germany)DEGerman

CHOCLAB - Instruments and Standard-Test Procedures for Laser Beam and Optics Characterisation. Untersuchungen zur normungsrelevanten Charakterisierung der Strahlparameter von Excimerlasern. Teilvorhaben: Charakterisierung und Standard-Testverfahren fuer Laserstrahlung und optische Komponenten Abschlussbericht

The target of the project Investigations to the characterisation of beam parameters of excimerlaser for standardisation within the EUREKA-project EUROLASER CHOCLAB: Instruments and Standard Test Procedures for Laser Beam and Optics Characterisation was the scientific development of measurement procedures and techniques for characterising the beam parameters of excimer lasers to overcome the deficit of standardisation for this important industrial laser class. A special UV-camera based beam profile measurement system was developed for measuring the energy density distribution of laser beams in the near as well as the far field. Different procedures to determine the beam parameters beam width, divergence, beam position and beam pointing stability were investigated and compared to each other to find the most useful and reliable one for excimer laser beams. In addition, the special temporal behaviour of the beam parameters was analysed when the laser worked in the typical burst mode. Basing on these results guidelines were developed for measurement technique and evaluation procedures for standardised characterisation of excimer laser beams. (orig.)SIGLEAvailable from TIB Hannover: F99B315+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany); European Union (Euro), Brussels (Belgium)DEGerman