Submicron Structure Fabrication and Research

Contains reports on six research projects.Joint Services Electronics Program (Contract DAAG29-78-C-0020)Joint Services Electronics Program (Contract DAAG29-80-C-0104)M.I.T. Sloan Fund for Basic ResearchU.S. Navy - Office of Naval Research (Contract N00014-79-C-0908)Lawrence Livermore Laboratory (Subcontract 206-92-09)U.S. Department of Energy (Contract DE-ACO2-80-E10179)Harkness Foundatio

Submicron Structures Fabrication and Research

Contains reports on twelve research projects.Lawrence Livermore Laboratory (Subcontract 2069209)Joint Services Electronics Program (Contract DAAG29-C-0104)U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908)Joint Services Electronics Program (Contract DAAG29-80-C-0104)Harkness FoundationI.B.M.U.S. Department of Energy (Contract DE-ACO2-80-E10179)National Science Foundation (Grant ECS80-17705

Submicron Structures Fabrication and Research

Contains reports on thirteen research projects.Joint Services Electronics Program (Contract DAAG29-83-K-0003)U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908)National Science Foundation (Grant ECS82-05701)I.B.M. (PO No. 90305-QPSA-559)U.S. Department of Energy (Contract DE-AC02-82-ER13019)Lawrence Livermore Laboratory (Contract 2069209

Microstructure Fabrication

Contains reports on seven research projects.National Science Foundation (Grant ENG78-10436)M.I.T. Sloan Fund for Basic ResearchJoint Services Electronics Program (Contract DAAG29-78-C-0020)U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908)M.I.T. Cabot FundLawrence Livermore Laboratory (Subcontract 206-92-09)National Science Foundation (Grant DMR78-23555

Submicron Structures Technology and Research

Contains reports on thirteen research projects.Joint Services Electronics Program (Contract DAAG29-83-K-0003)U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908)National Science Foundation (Contract ECS82-05701)U.S. Department of Energy (Contract DE-ACO2-82-ER-13019)Lawrence Livermore Laboratory (Contract 2069209)National Aeronautics and Space Administration (Contract NGL-22-009-638)U.S. Navy - Office of Naval Research (Contract N00014-84-K-0073)National Science Foundation (Grant ECS80-17705)National Science Foundation (Grant ENG79-09980

Submicron Structures Technology and Research

Contains reports on fourteen research projects.Joint Services Electronics Program (Contract DAAG29-83-K-0003)U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908)National Science Foundation (Grant ECS82-05701)Semiconductor Research Corporation (Grant 83-01-033)U.S. Department of Energy (Contract DE-ACO2-82-ER-13019)Lawrence Livermore National Laboratory (Contract 2069209)National Aeronautics and Space Administration (Contract NAS5-27591)Defense Advanced Research Projects Agency (Contract N00014-79-C-0908)National Science Foundation (Grant ECS80-17705)National Aeronautics and Space Administration (Contract NGL22-009-638