Lead Zirconate Titanate Thick-Film Ultrasonic Transducer for 1 to 20 MHz Frequency Bands Fabricated by Hydrothermal Polycrystal Growth

A thickness vibration mode ultrasonic transducer was fabricated by hydrothermal deposition of lead zirconate titanate polycrystalline thick film. This hydrothermal polycrystalline PZT thick-film (HPTF-PZT) ultrasonic transducer was studied for its wide-frequency-band transmission characteristics. The transducer had a 50-mm-thick PZT layer on a 50-mm-thick titanium substrate in an active area of 8 mm  8 mm. The experimental results showed the HPTF-PZT ultrasonic transducer radiated a single ultrasound pulse in the frequency range from 1 to 20 MHz with a 20 dB deviation. Additionally, this transducer generated a 2 MHz sawtooth ultrasonic wave with odd-and even order-harmonic components from the 2nd to the 11th harmonics. These results indicate that the fabricated ultrasonic transducer has satisfactory wide-band characteristics for a MHz frequency range ultrasonic transmitter

A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.</p