An influence of electron beam on thin oxide films

Bakalárska práca sa zaoberá skúmaním vplyvu elektrónového lúča rastrovacieho elektrónového mikroskopu na povrch vzorky SiO2/Si(100). V práci je stručne popísaná elektrónová mikroskopia a mikroskopia atomárnych síl. Hlavným riešeným problémom je pozorovaná zmena odtieňu pri pozorovaní vzorky SiO2/Si(100) rastrovacím elektrónovým mikroskopom. V práci je zistené, že na povrchu vzorky sa vytvárajú objekty o výške niekoľko nm. Zvyšok práce je potom venovaný meraniu závislosti výšky objektu na rôznych premenných. Merania sú väčšinou založené na selektívnom ožarovaní povrchu vzorky rastrovacím elektrónovým mikroskopom, meraní ožiarených častí pomocou mikroskopu atomárnych síl a vyhodnocovaní v aplikácie Gwyddion.This bachelor work deals with a study of the influence of electron beam of scanning electron microscope on the surface of the SiO2/Si (100) – sample. In the work the electron and atomic force microscopy briefly described. The main objective of experimental part is to describe variation in the brightness of sample SiO2/Si (100) in Scanning electron microscope images. In this study is found that on the sample surface are created objects few nm high. The rest of the work is then devoted to measuring the dependence of the object’s high on different variables. Experiments are generally based on the selective irradiation of the sample surface by scanning electron microscope, measurement of irradiated parts using atomic force microscope and evaluation in the application Gwyddion.

In-situ Wear Process Monitoring by Optical Methods

The thesis describes the development of methodology for in-situ observation of a wear process. The main goal is to correlate the friction coefficient development with the video record. It is approached by designing the external device that counts the cycles and determines the period based on infrared reflectance sensor. Another problem solved is the evaluation of the possibility of using the external probe for the in-situ Raman spectra measurement. The proposed interpretation technique is used for the deviation measurement at different rotational velocities. The techniques are demonstrated on the steel samples and DLC samples.Validerat; 20120706 (anonymous