Graphite Nanostructures Produce in the Acetylene, Argon-Acetylene and Argon-Hydrogen-Acetylene Plasmas

The amorphous carbon films were deposited on silicon-metal substrates by plasma jet chemical vapor deposition (PJCVD) and plasma enchanted CVD (PECVD). PJCVD carbon coatings have been prepared at atmospheric pressure in Ar/ C2H2 and Ar/H2/C2H2 mixtures. The films prepared in Ar/C2H2 plasma are attributed to graphite-like carbon films. Addition of the hydrogen decreases growth rate and the surface roughness of the coatings, but coatings have low fraction of oxygen (~5 at.%) The formation of the nanocrystalline graphite was obtained in Ar/H2/C2H2 plasma. The carbon nanotubes were synthesed by PECVD using Au/Cr catalyst particles at low (≤ 450 C; p = 40 Pa ) temperature in pure acetylene. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/3538