Electromagnetic Modeling and Measurement of Adaptive Metamaterial Structural Elements

This document addresses two major obstacles facing metamaterial development: uncertainty in the characterization of electromagnetic field behavior in metamaterial structures and the relatively small operational bandwidth of metamaterial structures. To address the first obstacle, a method of prediction aided measurement is developed and exploited to examine the field interactions within metamaterial devices. The fusion of simulation and measurement techniques enhances the understanding of the physical interactions of fields in the presence of metamaterials. To address the second obstacle, this document characterizes the effectiveness of an adaptive metamaterial design that incorporates a microelectromechanical systems (MEMS) variable capacitor. Applying voltages to the MEMS device changes the resonant frequency of the metamaterial. In this research, various capacitor layouts are examined with computational models and stripline measurements, leading to recommendations for design improvements

Electrostatically Tunable Meta-Atoms Integrated With In Situ Fabricated MEMS Cantilever Beam Arrays

Two concentric split ring resonators (SRRs) or meta-atoms designed to have a resonant frequency of 14 GHz are integrated with microelectromechanical systems cantilever arrays to enable electrostatic tuning of the resonant frequency. The entire structure was fabricated monolithically to improve scalability and minimize losses from externally wire-bonded components. A cantilever array was fabricated in the gap of both the inner and outer SRRs and consisted of five evenly spaced beams with lengths ranging from 300 to 400 μm. The cantilevers pulled in between 15 and 24 V depending on the beam geometry. Each pulled-in beam increased the SRR gap capacitance resulting in an overall 1-GHz shift of the measured meta-atom resonant frequency

SRRs Embedded with MEMS Cantilevers to Enable Electrostatic Tuning of the Resonant Frequency

A microelectromechanical systems (MEMS) cantilever array was monolithically fabricated in the gap region of a split ring resonator (SRR) to enable electrostatic tuning of the resonant frequency. The design consisted of two concentric SRRs each with a set of cantilevers extending across the split region. The cantilever array consisted of five beams that varied in length from 300 to 400 μm, with each beam adding about 2 pF to the capacitance as it actuated. The entire structure was fabricated monolithically to reduce its size and minimize losses from externally wire bonded components. The beams actuate one at a time, longest to shortest with an applied voltage ranging from 30–60 V. The MEMS embedded SRRs displayed dual resonant frequencies at 7.3 and 14.2 GHz or 8.4 and 13.5 GHz depending on the design details. As the beams on the inner SRR actuated the 14.2 GHz resonance displayed tuning, while the cantilevers on the outer SRR tuned the 8.4 GHz resonance. The 14.2 GHz resonant frequency shifts 1.6 GHz to 12.6 GHz as all the cantilevers pulled-in. Only the first two beams on the outer cantilever array pulled-in, tuning the resonant frequency 0.4 GHz from 8.4 to 8.0 GHz

Characterization of a Variation on AFIT’s Tunable MEMS Cantilever Array Metamaterial

Metamaterials are devices with embedded structures that provide the device with unique properties. Several applications for metamaterials have been proposed including electromagnetic cloaks, lenses with improved resolution over traditional lenses, and improved antennas. This research addresses an obstacle to practical metamaterial development, namely the small bandwidth of current metamaterial devices. This research characterizes the effectiveness of several metamaterial designs. The basic design incorporates a microelectromechanical systems (MEMS) variable capacitor into a double negative (DNG) metamaterial structure. One set of devices is fabricated with the MEMS capacitor in the gap of the split ring resonator (SRR) of the DNG metamaterial. Applying voltage to the MEMS device changes the effective capacitance, thereby adjusting the resonant frequency of the device. Additionally, similar devices with three possible capacitor layouts are examined with stripline measurements and computer models. Recommendations for design improvements are provided. The initial capacitor layout with MEMS capacitors in the split ring gaps is recommended for future design iterations with adjusted gap capacitance values