Optimal and Robust Design Method for Two-Chip Out-of-Plane Microaccelerometers

In this paper, an optimal and robust design method to implement a two-chip out-of-plane microaccelerometer system is presented. The two-chip microsystem consists of a MEMS chip for sensing the external acceleration and a CMOS chip for signal processing. An optimized design method to determine the device thickness, the sacrificial gap, and the vertical gap length of the M EMS sensing element is applied to minimize the fundamental noise level and also to achieve the robustness to the fabrication variations. In order to cancel out the offset and gain variations due to parasitic capacitances and process variations, a digitally trimmable architecture consisting of an 11 bit capacitor array is adopted in the analog front-end of the CMOS capacitive readout circuit. The out-of-plane microaccelerometer has the scale factor of 372 mV/g∼389 mV/g, the output nonlinearity of 0.43% FSO∼0.60% FSO, the input range of ±2 g and a bias instability of 122 μg∼229 μg. The signal-to-noise ratio and the noise equivalent resolution are measured to be 74.00 dB∼75.23 dB and 180 μg/rtHz∼190 μg/rtHz, respectively. The in-plane cross-axis sensitivities are measured to be 1.1%∼1.9% and 0.3%∼0.7% of the out-of-plane sensitivity, respectively. The results show that the optimal and robust design method for the MEMS sensing element and the highly trimmable capacity of the CMOS capacitive readout circuit are suitable to enhance the die-to-die uniformity of the packaged microsystem, without compromising the performance characteristics

A Dynamic Instrumentation Amplifier for Low-Power and Low-Noise Biopotential Acquisition

A low-power and low-noise dynamic instrumentation amplifier (IA) for biopotential acquisition is presented. A dynamic IA that can reduce power consumption with a timely piecewise power-gating method, and noise level with an alternating input and chopper stabilization technique is fabricated with a 0.13-μm CMOS. Using the reconfigurable architecture of the IA, various combinations of the low-noise schemes are investigated. The combination of power gating and chopper stabilization shows a lower noise performance than the combination of power gating and alternating input switching scheme. This dynamic IA achieved a power reduction level of 50% from 10 µA to 5 µA and a noise reduction of 90% from 9.1 µVrms to 0.92 µVrms with the combination of the power gating and chopper stabilization scheme

Reconfigurable Multiparameter Biosignal Acquisition SoC for Low Power Wearable Platform

A low power and low noise reconfigurable analog front-end (AFE) system on a chip (SoC) for biosignal acquisition is presented. The presented AFE can be reconfigured for use in electropotential, bioimpedance, electrochemical, and photoelectrical modes. The advanced healthcare services based on multiparameter physiological biosignals can be easily implemented with these multimodal and highly reconfigurable features of the proposed system. The reconfigurable gain and input referred noise of the core instrumentation amplifier block are 25 dB to 52 dB, and 1 μVRMS, respectively. The power consumption of the analog blocks in one readout channel is less than 52 μW. The reconfigurable capability among various modes of applications including electrocardiogram, blood glucose concentration, respiration, and photoplethysmography are shown experimentally

Low-Power Photoplethysmogram Acquisition Integrated Circuit with Robust Light Interference Compensation

To overcome light interference, including a large DC offset and ambient light variation, a robust photoplethysmogram (PPG) readout chip is fabricated using a 0.13-μm complementary metal–oxide–semiconductor (CMOS) process. Against the large DC offset, a saturation detection and current feedback circuit is proposed to compensate for an offset current of up to 30 μA. For robustness against optical path variation, an automatic emitted light compensation method is adopted. To prevent ambient light interference, an alternating sampling and charge redistribution technique is also proposed. In the proposed technique, no additional power is consumed, and only three differential switches and one capacitor are required. The PPG readout channel consumes 26.4 μW and has an input referred current noise of 260 pArms

0.6 V, 116 nW Neural Spike Acquisition IC with Self-Biased Instrumentation Amplifier and Analog Spike Extraction

This paper presents an ultralow power 0.6 V 116 nW neural spike acquisition integrated circuit with analog spike extraction. To reduce power consumption, an ultralow power self-biased current-balanced instrumentation amplifier (IA) is proposed. The passive RC lowpass filter in the amplifier acts as both DC servo loop and self-bias circuit. The spike detector, based on an analog nonlinear energy operator consisting of a low-voltage open-loop differentiator and an open-loop gate-bulk input multiplier, is designed to emphasize the high frequency spike components nonlinearly. To reduce the spike detection error, the adjacent spike merger is also proposed. The proposed circuit achieves a low IA current consumption of 46.4 nA at 0.6 V, noise efficiency factor (NEF) of 1.81, the bandwidth from 102 Hz to 1.94 kHz, the input referred noise of 9.37 μVrms, and overall power consumption of 116 nW at 0.6 V. The proposed circuit can be used in the ultralow power spike pulses acquisition applications, including the neurofeedback systems on peripheral nerves with low neuron density

Fully Integrated Biopotential Acquisition Analog Front-End IC

A biopotential acquisition analog front-end (AFE) integrated circuit (IC) is presented. The biopotential AFE includes a capacitively coupled chopper instrumentation amplifier (CCIA) to achieve low input referred noise (IRN) and to block unwanted DC potential signals. A DC servo loop (DSL) is designed to minimize the offset voltage in the chopper amplifier and low frequency respiration artifacts. An AC coupled ripple rejection loop (RRL) is employed to reduce ripple due to chopper stabilization. A capacitive impedance boosting loop (CIBL) is designed to enhance the input impedance and common mode rejection ratio (CMRR) without additional power consumption, even under an external electrode mismatch. The AFE IC consists of two-stage CCIA that include three compensation loops (DSL, RRL, and CIBL) at each CCIA stage. The biopotential AFE is fabricated using a 0.18 μm one polysilicon and six metal layers (1P6M) complementary metal oxide semiconductor (CMOS) process. The core chip size of the AFE without input/output (I/O) pads is 10.5 mm2. A fourth-order band-pass filter (BPF) with a pass-band in the band-width from 1 Hz to 100 Hz was integrated to attenuate unwanted signal and noise. The overall gain and band-width are reconfigurable by using programmable capacitors. The IRN is measured to be 0.94 μVRMS in the pass band. The maximum amplifying gain of the pass-band was measured as 71.9 dB. The CIBL enhances the CMRR from 57.9 dB to 67 dB at 60 Hz under electrode mismatch conditions