CORE
🇺🇦Â
 make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Filters
2 research outputs found
Wafer Stage Motion Control:from Experiment Design to Robust Performance
Author
Dirkx Nic Jasper
Publication venue
Eindhoven University of Technology
Publication date
06/10/2023
Field of study
Get PDF
Pure OAI Repository
Wafer Stage Motion Control:from Experiment Design to Robust Performance
Author
Dirkx Nic Jasper
Publication venue
Eindhoven University of Technology
Publication date
06/10/2023
Field of study
No full text
Pure OAI Repository
Get PDF
No full text
