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1 research outputs found
Advanced inductively coupled plasma etching processes for fabrication of resonator-quantum well infrared photodetector
Author
A. Waczynski
C.A. Jhabvala
+17Â more
Choi
Choi
Choi
Choi
Eker
Etrillard
Golka
Hayes
J. Sun
K. Olver
K.K. Choi
Knoedler
M.D. Jhabvala
Mitchell
Pearton
Sun
Sun
Publication venue
'Elsevier BV'
Publication date
Field of study
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