Thickness and dielectric constant determination of thin dielectric layers

We derive a method for the determination of the dielectric constant and thickness of a thin dielectric layer, deposited on top of a thick dielectric layer which is in turn present on a metal film. Reflection of p- and s-polarized light from the metal layer yields minima for certain angles of incidence where the light is absorbed by the metal. The thin dielectric layer causes shifts in the angles at which the minima occur, from which the thickness and dielectric constant can be obtained. The model is tested for 3.5 and 14 nm thick photoresist gratings

Determination of thickness and dielectric constant of thin transparent dielectric layers using surface plasmon resonance

The determination of the thickness and dielectric constant of thin dielectric layers by means of surface plasmon resonance is discussed. It appears to be impossible to determine these parameters from one surface plasmon response experiment. This is illustrated theoretically. Variation of the refractive index of the solution in which surface plasmon experiments were performed allowed us to determine these parameters separately

A dielectric/metal layer system as chemical sensor

Simulations and experiments are presented of a dielectric/metal layer structure as a chemical sensor, that exhibits a sensitivity comparable to that found for SPR sensors, but without their drawbacks. The sensitivity to both s- and p-type light permits the measurements of additional parameters of the chemical system under study