CORE
🇺🇦Â
 make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Filters
1 research outputs found
Characterization and enviromental impact of plasma products within an ion implanter
Author
Alford  TL
Boudreault  G
+10Â more
Brown  B
Collart  EJH
Jeynes  C
Kirkby  KJ
Mefo  J
Nastasi  M
Sealy  B
Vella  MC
Webb  RP
Zurrug  H
Publication venue
Publication date
01/01/2003
Field of study
Get PDF
University of Surrey
Surrey Research Insight