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2 research outputs found
High-pressure magnetron sputtering: Gas-phase processes
Author
A. G. Zhiglinsky
A. G. Zhiglinsky
+20Â more
A. G. Znamenskii
A. M. Myers
C. T. Eom
D. W. Hoffman
I. D. Morozov
I. Petrov
J. A. Valles-Abarca
J. M. Harper
K. Sakuta
L. D. Landau
R. A. Brizzolara
R. E. Somekh
R. S. Robinson
S. M. Rossnagel
S. M. Rossnagel
Th. Schurig
V. A. Marchenko
V. N. Kondrat’ev
W. D. Westwood
Y. Okabe
Publication venue
'Pleiades Publishing Ltd'
Publication date
Field of study
No full text
Crossref
Application of argon collisional-radiative model for inductive RF discharge research
Author
Azamat R Gizzatullin
+16Â more
Azat R Gizzatullin
Boffard J B
Boffard J B
Crintea D L
Donelly V M
E F Voznesencky
Huddlestone R H
Siepa S L
Siepa S L
Y O Zhelonkin
Zatsarinny O
Zatsarinny O
Zhiglinsky A G
Zhu X-M
Zhu X-M
Zhu X-M
Publication venue
'IOP Publishing'
Publication date
Field of study
No full text
Crossref