NANOINDENTATION TEST FOR DLC COATING ANALYSIS

Resume In this report the effects of the substrate on the microhardness of Diamond like carbon (DLC) thin films were investigated. The DLC coatings were deposited by Radio Frequency Plasma Actived Chemical Vapor Deposition (RF PACVD; 13,56 MHz) process on three mechanically polished substrates, which were chosen for comparison; hardened molybdenum high speed steel AISI M2, unhardened tool steel AISI L2 and titanium alloy TiAl6V4. The aim of the present investigation was to determine the influence of substrates on microhardness and other mechanical properties of DLC layer. These properties especially microhardness were studied and compared from nanoindentation load -displacement curves. Results show that the hardness of the substrate is the crucial value for the hardness of the DLC films

The Study of the DLC and DLC-Si Coating Structure on Mechanical Properties

In this paper, diamond-like carbon (DLC) films and DLC-Si films were studied. These films were deposited by DC-plasma-assisted chemical vapour deposition (PACVD). X-ray diffraction analysis of coatings was used for a determination of coatings structure. In particular, the effect of the crystal structure of the coatings on their mechanical properties was studied

The Study of the DLC and DLC-Si Coating Structure on Mechanical Properties

In this paper, diamond-like carbon (DLC) films and DLC-Si films were studied. These films were deposited by DC-plasma-assisted chemical vapour deposition (PACVD). X-ray diffraction analysis of coatings was used for a determination of coatings structure. In particular, the effect of the crystal structure of the coatings on their mechanical properties was studied

The Study of DLC and Si-DLC Based Coatings and Their Mechanical Properties

In this paper, diamond-like carbon (DLC) films and DLC-Si films were studied. These films were deposited by DC-plasma-assisted chemical vapour deposition (PACVD). X-ray diffraction analysis of coatings was used for a determination of coatings structure. In particular, the effect of the crystal structure of the coatings on their mechanical properties was studied