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1 research outputs found
Optimization of Post Etch Cobalt Compatible Clean by pH and Oxidizer
Author
Akihisa Iwasaki
Els Kesters
+8Â more
Frank Holsteyns
Hideaki Iino
Jens Rip
Quoc Toan Le
Toru Masaoka
Yuichi Ogawa
Yusuke Oniki
Yuya Akanishi
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'Trans Tech Publications, Ltd.'
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