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2 research outputs found
Features of self-sustained magnetron sputtering of evaporating metal target
Author
Bleykher Galina Alekseevna
Grudinin Vladislav Alekseevich
+3Β more
Shabunin Artem Sergeevich
Sidelev Dmitry Vladimirovich
Yuryeva Alena Victorovna
Publication venue
Publication date
01/01/2019
Field of study
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Electronic archive of Tomsk Polytechnic University
The energy flux onto substrate during coating deposition using magnetron with liquid metal target
Author
Bleykher Galina Alekseevna
Borduleva Alena Olegovna
Yuryeva Alena Victorovna
Publication venue
Publication date
01/01/2016
Field of study
No full text
Electronic archive of Tomsk Polytechnic University
Get PDF
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