Electrochemical mechanical micromachining based on confined etchant layer technique

National Science Foundation of China [91023006, 91023047, 91023043, 21061120456, 21021002]; Natural Science Foundation of Fujian Province of China [2012J06004]; Fundamental Research Funds for the Central Universities [2010121022]; Scientific Research Foundation for the Returned Overseas Chinese Scholars (State Education Ministry)The confined etchant layer technique (CELT) has been proved an effective electrochemical microfabrication method since its first publication at Faraday Discussions in 1992. Recently, we have developed CELT as an electrochemical mechanical micromachining (ECMM) method by replacing the cutting tool used in conventional mechanical machining with an electrode, which can perform lathing, planing and polishing. Through the coupling between the electrochemically induced chemical etching processes and mechanical motion, ECMM can also obtain a regular surface in one step. Taking advantage of CELT, machining tolerance and surface roughness can reach micro-or nano-meter scale

28.6 A 78.5dB-SNDR radiation- and metastability-tolerant two-step split SAR ADC operating up to 75MS/s with 24.9mW power consumption in 65nm CMOS

High-resolution, low-power radiation-tolerant ADCs are under great demand from medical, aerospace and high-energy physics applications. In the ATLAS Liquid Argon Calorimeter of the LHC experiment at CERN, the radiation operation condition coupled with the large dynamic range (>12b ENOB), 40-80MS/s sample rate and low power (for cooling system requirement) specs [1] make the design of such ADCs a very challenging task

Periodic Folded Gold Nanostructures with a Sub-10 nm Nanogap for Surface-Enhanced Raman Spectroscopy

Surface-enhanced Raman spectroscopy has emerged as a powerful spectroscopy technique for detection with its capacity for label-free, nondestructive analysis, and ultrasensitive characterization. High-performance surface-enhanced Raman scattering (SERS) substrates with homogeneity and low cost are the key factors in chemical and biomedical analysis. In this study, we propose the technique of atomic force microscopy (AFM) scratching and nanoskiving to prepare periodic folded gold (Au) nanostructures as SERS substrates. Initially, folded Au nanostructures with tunable nanogaps and periodic structures are created through the scratching of Au films by AFM, the deposition of Ag/Au films, and the cutting of epoxy resin, reducing fabrication cost and operational complexity. Periodic folded Au nanostructures show the three-dimensional nanofocusing effect, hotspot effect, and standing wave effect to generate an extremely high electromagnetic field. As a typical molecule to be tested, p-aminothiophenol has the lowest detection limit of up to 10–9 M, owing to the balance between the electromagnetic field energy concentration and the transmission loss in periodic folded Au nanostructures. Finally, by precisely controlling the periods and nanogap widths of the folded Au nanostructures, the synergistic effect of surface plasmon resonance is optimized and shows good SERS properties, providing a new strategy for the preparation of plasmonic nanostructures

A Leveling Method Based on Current Feedback Mode of Scanning Electrochemical Microscopy

Substrate leveling is an essential but neglected instrumental technique of scanning electrochemical microscopy (SECM). In this technical note, we provide an effective substrate leveling method based on the current feedback mode of SECM. By using an air-bearing rotary stage as the supporter of an electrolytic cell, the current feedback presents a periodic waveform signal, which can be used to characterize the levelness of the substrate. Tuning the adjusting screws of the tilt stage, substrate leveling can be completed in minutes by observing the decreased current amplitude. The obtained high-quality SECM feedback curves and images prove that this leveling technique is valuable in not only SECM studies but also electrochemical machining

A leveling method based on current feedback mode of scanning electrochemical microscopy

Substrate leveling is an essential but neglected instrumental technique of scanning electrochemical microscopy (SECM). In this technical note, we provide an effective substrate leveling method based on the current feedback mode of SECM. By using an air-bearing rotary stage as the supporter of an electrolytic cell, the current feedback presents a periodic waveform signal, which can be used to characterize the levelness of the substrate. Tuning the adjusting screws of the tilt stage, substrate leveling can be completed in minutes by observing the decreased current amplitude. The obtained high-quality SECM feedback curves and images prove that this leveling technique is valuable in not only SECM studies but also electrochemical machining. ? 2013 American Chemical Society