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3 research outputs found
Plasma etch technologies for the development of ultra-small feature size transistor devices
Author
Agarawal A Stout P Rauf S Collins K
+23Â more
Banerjee S
Boning D S Claman J L Wong K S Dalton T J Sawin H H
C M Faulkner
C O'Mahony
D Borah
Doyle B
Hildreth O Alvarez C Wong C P
Hopwood J
J D Holmes
Jansen H
Kenoyer L Oxford R Moll A
Krishnamohan T Saraswat
Liu B
M A Morris
M Bosea
M T Shaw
McAuley S A
Oehrlein G S
P Gleeson
R A Farrell
S Rasappa
Shamiryan D
Yeom J Wu Y Shannon M A
Publication venue
'IOP Publishing'
Publication date
Field of study
Full text link
Crossref
A mechanical de-tethering technique for silicon MEMS etched with a DRIE process
Author
Agnus J
Chiu Y-S
+14Â more
Cuiy Z
D Hériban
Dechev N Ren L Liu W Cleghorn W L Mills J K
Gauthier M Lopez-Walle B Clevy C
J Agnus
Jang W
Liu A
Liu Ai-Qun
M Gauthier
Murakami Y
Popa D O Murthy R Sin J Mittal M Stephanou H E
Tada H
V Petrini
Yeom J Wu Y Shannon M A
Publication venue
'IOP Publishing'
Publication date
Field of study
No full text
Crossref
Selective Adsorption and Thermal Evolution of Bifunctional Carboxylic Acids: Competition of O—H Dissociation and Other Reaction Products in Acrylic Acid and Propanoic Acid on Si(100)2×1
Author
Becke A. D.
Bent S. F.
+49Â more
Bitzer T.
Bitzer T.
Bozso F.
Buriak J. M.
Buriak J. M.
Carey F. A.
Casaletto M. P.
Casaletto M. P.
Cheng C. C.
Cheng C. C.
Clemen L.
Ebrahimi M.
Eng J.
Favero P. P.
Filler M. A.
Filler M. A.
Frisch M. J.
Hamers R. J.
Hamers R. J.
Hill E. K.
Hwang E.
Hwang H.-N.
Ikeda M.
Ikeura-Sekiguchi H.
Kim D. H.
Kim J.
Kohn W.
Kubo T.
Lee C.
Lee H.-K.
Leftwich T. R.
Li Q.
Liu H.
Lopez A.
Lu X.
Luo Y.-R.
Mayne A. J.
Mui C.
Pavia D. L.
Shannon C.
Tanaka S.
Taylor P. A.
Waltenburg H. N.
Wolkow R. A.
Wolkow R. A.
Wu J.-B.
Yates J. T.
Yeom H. W.
Yoshinobu J.
Publication venue
'American Chemical Society (ACS)'
Publication date
Field of study
No full text
Crossref