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110 research outputs found
A Low Damage, Low Contaminant Plasma Processing System Utilizing Energy Clean Technology
Author
Goto Haruhiro
Kamiya Osamu
+5 more
Ohmi Tadahiro
Okamura Nobuyuki
Sasaki Makoto
Shibata Tadashi
Yamagami Atsushi
Publication venue
'Institute of Electrical and Electronics Engineers (IEEE)'
Publication date
21/04/2010
Field of study
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Tohoku University Repository (TOUR) / 東北大学機関リポジトリ
Institutional Repositories DataBase (IRDB)
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