Investigation of SiC/Oxide Interface Structures by Spectroscopic Ellipsometry

We have investigated SiC/oxide interface structures by the use of spectroscopic ellipsometry. The depth profile of the optical constants of thermally grown oxide layers on SiC was obtained by observing the slope-shaped oxide layers, and the results suggest the existence of the interface layers, around 1 nm in thickness, having high refractive index than those of both SiC and SiO2. The wavelength dispersions of optical constants of the interface layers were measured in the range of visible to deep UV spectral region, and we found the interface layers have similar dispersion to that of SiC, though the refractive indices are around 1 larger than SiC, which suggests the interface layers are neither transition layers nor roughness layers, but modified SiC, e.g., strained and/or modified composition. By the use of an in-situ ellipsometer, real-time observation of SiC oxidation was performed, and the growth rate enhancement was found in the thin thickness regime as in the case of Si oxidation, which cannot be explained by the Deal-Grove model proposed for Si oxidation. From the measurements of the oxidation temperature and oxygen partial pressure dependences of oxidation rate in the initial stage of oxidation, we have discussed the interface structures and their formation mechanisms within the framework of the interfacial Si-C emission model we proposed for SiC oxidation mechanism

Silicon carbide and related materials 2001

ICSCRM 2001

Endoscopic Observation of the Growth Process of a Right-Side Sessile Serrated Adenoma/Polyp with Cytological Dysplasia to an Invasive Submucosal Adenocarcinoma

A sessile serrated adenoma/polyp (SSA/P) with cytological dysplasia in the right colon, which transformed to an invasive submucosal adenocarcinoma finally, was endoscopically observed in a 76-year-old woman. A whitish soft SSA/P (approximately 25 mm in diameter) was detected in the cecum. Biopsy samples were obtained from the small nodule, and the lesion was eventually diagnosed as an SSA/P with cytological dysplasia, considering endoscopic observations, among which the narrow-band imaging features suggested that the lesion was adenomatous, that is, a round-oval pattern, and hyperplastic, that is, comprising a circular pattern with dots and an invisible capillary vessel. After 11 months, an SSA/P had rapidly developed into a submucosal adenocarcinoma with lymphatic infiltrations, and the most aggressive deep invasion was observed in the central depression. This case suggests that right-side SSA/Ps with cytological dysplasia should be removed immediately, considering the potential for rapid progression to a larger size and eventually to deep and extensive cancer