High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter

The development of a capacitive microphone with an integrated detection circuit is described. The condenser microphone is made by micromachining of polyimide on silicon. Therefore, the structure can be realized by postprocessing on substrates containing integrated circuits (IC's), independently of the IC process, integrated microphones with excellent performances have been realized on a CMOS substrate containing dc-dc voltage converters and preamplifiers. The measured sensitivity of the integrated condenser microphone was 10 mV/Pa, and the equivalent noise level (ENL) was 27 dB(A) re. 20 ¿Pa for a power supply voltage of 1.9 V, which was measured with no bias voltage applied to the microphone. Furthermore, a back chamber of infinite volume was used in all reported measurements and simulation

A polymer condenser microphone on silicon with on-chip cmos amplifier

In this paper the development of a capacitive microphone with integrated preamplifier is described. The condenser microphone is made by micromachining of polyimide on silicon, and is compatible with CMOS technology. Therefore, the structure can be realised by post processing on substrates containing integrated circuits, independently of the IC process. Microphones with a required DC bias voltage of 4 V have been realised on a CMOS substrate containing PMOS buffer preamplifiers. From the measurements on these structures, it is illustrated how an immediate improvement of 4.8 dB of the microphone sensitivity and noise level can be obtained by using the integrated preamplifier. The measured sensitivity of the integrated condenser microphone was 2.5 mV/Pa and the equivalent noise level (ENL) was 29.5 dB(A) SP

A bi-directional electrochemically driven micro liquid dosing system with integrated sensor/actuator electrodes

In this contribution a micro liquid dosing system is presented, which allows bi-directional manipulation of fluids (i.e. pushing out and pulling in of liquids) by the electrochemical generation and removal of gas bubbles. Bi-directionality is obtained by reversal of the actuation current thereby causing the earlier produced gasses to react back to water. This reduction of gas volume actively pulls liquid back into the system. The electrochemical actuator electrodes have been specially designed to perform the simultaneous measurement of conductivity, via which the total amount of gas can be estimated. As this amount equals the total dosed volume of liquid, dispensed volumes can be determined on-line during experiment

On the integration of a microdialysis-based microTAS with calibration facility on a silicon-glass sandwich

The integration is discussed of all parts of a microdialysis-based micro Total Analysis System or ¿TAS. In particular a microdialysis probe, a potentiometric and amperometric ion- and enzyme sensor and a calibration dosing pump have been developed separately using different precision machining techniques. By modifying and adapting these parts they can be realized in one generic technology consisting of a stack of a silicon and a glass wafer. The silicon wafer contains the double lumen microdialysis probe connections, a dosing pump chamber with meander formed cavities containing the calibration solutions and small cavities for both the potentiometric and amperometric sensor. The glass wafer contains all the electrical contacts and wires for the sensors, the pump and Interconnections. Both wafers are anodically bonded to each other, yielding a hermetically sealed liquid handling syste

The design, fabrication, and testing of corrugated silicon nitride diaphragms

Silicon nitride corrugated diaphragms of 2 mm×2 mm×1 ¿m have been fabricated with 8 circular corrugations, having depths of 4, 10, or 14 ¿m. The diaphragms with 4-¿m-deep corrugations show a measured mechanical sensitivity (increase in the deflection over the increase in the applied pressure) which is 25 times larger than the mechanical sensitivity of flat diaphragms of equal size and thickness. Since this gain in sensitivity is due to reduction of the initial stress, the sensitivity can only increase in the case of diaphragms with initial stress. A simple analytical model has been proposed that takes the influence of initial tensile stress into account. The model predicts that the presence of corrugations increases the sensitivity of the diaphragms, because the initial diaphragm stress is reduced. The model also predicts that for corrugations with a larger depth the sensitivity decreases, because the bending stiffness of the corrugations then becomes dominant. These predictions have been confirmed by experiments. The application of corrugated diaphragms offers the possibility to control the sensitivity of thin diaphragms by geometrical parameters, thus eliminating the effect of variations in the initial stress, due to variations in the diaphragm deposition process and/or the influence of temperature changes and packaging stres

Constructing a proton titration curve from ion-step measurements, applied to a membrane with adsorbed protein

A new measuring method is described for obtaining a proton titration curve. The curve is obtained from a microporous composite membrane, consisting of polystyrene beads in an agarose matrix, with lysozyme molecules adsorbed to the bead surface. The membrane is incorporated into a sensor system by deposition on a silicon chip with a pH-sensitive ion-sensitive field effect transistor (ISFET) located in the middle of a Ag/AgCl electrode. The actual measurement is performed by creating a stepwise change in the salt concentration of the bathing electrolyte (the ion step) and measuring the ISFET potential versus the Ag/AgCl electrode. This potential shows a transient change in the ion step, which indicates a transient pH change in the membrane. This procedure is repeated at a series of pH values. Equations are presented to calculate the proton titration curve of the membrane from the amplitude and duration of the measured transients. Measurements show qualitative agreement between the curves obtained and equilibrium titration experiments on the same system

Energy from streaming current and potential

It is investigated how much energy can be delivered by a streaming current source. A streaming current and subsequent streaming potential originate when double layer charge is transported by hydrodynamic flow. Theory and a network model of such a source is presented and initial experimental results are given, showing a supplied power of 20 nW obtained by a pressure difference of 1 atm over a glass porous plug, using a 1-mM KCl solution. It is indicated how the rather low mechanical-to-electrical energy conversion efficiency can be increased